2006
DOI: 10.1134/s1063784206100203
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Measuring the parameters of dielectric layers by periodically charging the surface

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Cited by 5 publications
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“…The mode of operation for the new OPC diagnostic equipment used to study this phenomenon is fully described in the literature. [8][9][10] The following is a brief explanation of the principle of operation for this equipment.…”
Section: Introductionmentioning
confidence: 99%
“…The mode of operation for the new OPC diagnostic equipment used to study this phenomenon is fully described in the literature. [8][9][10] The following is a brief explanation of the principle of operation for this equipment.…”
Section: Introductionmentioning
confidence: 99%