Measurements of Variable-Shaped Electron Beams with Solid-State Detector and Scattering Aperture

Abstract

The state-selective dissociation dynamics for anionic and excited neutral fragments of gaseous SiCl 4 following Cl 2p and Si 2p core-level excitations were characterized by combining measurements of the photoninduced anionic dissociation, x-ray absorption and UV/visible dispersed fluorescence. The transitions of core electrons to high Rydberg states/doubly excited states in the vicinity of both Si 2p and Cl 2p ionization thresholds of gaseous SiCl 4 lead to a remarkably enhanced production of anionic, Si − and Cl − , fragments and excited neutral atomic, Si * , fragments. This enhancement via core-level excitation near the ionization threshold of gaseous SiCl 4 is explained in terms of the contributions from the Auger decay of doubly excited states, shake-modified resonant Auger decay, or/and post-collision interaction. These complementary results provide insight into the state-selective anionic and excited neutral fragmentation of gaseous molecules via core-level excitation.

Modified knife-edge method for current density distribution measurements in e-beam writers

“…[2][3][4][5][6][7][8][9][10] However, only a few of these are suitable for evaluation of the current density distribution in the exposure plane with an e-beam spot size below 10 lm. [2][3][4][5][6][7][8][9][10] However, only a few of these are suitable for evaluation of the current density distribution in the exposure plane with an e-beam spot size below 10 lm.…”

“…[9][10][11][12][13] In this method, the e-beam is scanned across a defined aperture with sharp edges and a detector positioned behind the aperture measures the transmitted electron current. [9][10][11][12][13] In this method, the e-beam is scanned across a defined aperture with sharp edges and a detector positioned behind the aperture measures the transmitted electron current.…”