2007
DOI: 10.1143/jjap.46.6166
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Measurements of Variable-Shaped Electron Beams with Solid-State Detector and Scattering Aperture

Abstract: The state-selective dissociation dynamics for anionic and excited neutral fragments of gaseous SiCl 4 following Cl 2p and Si 2p core-level excitations were characterized by combining measurements of the photoninduced anionic dissociation, x-ray absorption and UV/visible dispersed fluorescence. The transitions of core electrons to high Rydberg states/doubly excited states in the vicinity of both Si 2p and Cl 2p ionization thresholds of gaseous SiCl 4 lead to a remarkably enhanced production of anionic, Si − and… Show more

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Cited by 3 publications
(2 citation statements)
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“…[2][3][4][5][6][7][8][9][10] However, only a few of these are suitable for evaluation of the current density distribution in the exposure plane with an e-beam spot size below 10 lm. [2][3][4][5][6][7][8][9][10] However, only a few of these are suitable for evaluation of the current density distribution in the exposure plane with an e-beam spot size below 10 lm.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…[2][3][4][5][6][7][8][9][10] However, only a few of these are suitable for evaluation of the current density distribution in the exposure plane with an e-beam spot size below 10 lm. [2][3][4][5][6][7][8][9][10] However, only a few of these are suitable for evaluation of the current density distribution in the exposure plane with an e-beam spot size below 10 lm.…”
Section: Introductionmentioning
confidence: 99%
“…[9][10][11][12][13] In this method, the e-beam is scanned across a defined aperture with sharp edges and a detector positioned behind the aperture measures the transmitted electron current. [9][10][11][12][13] In this method, the e-beam is scanned across a defined aperture with sharp edges and a detector positioned behind the aperture measures the transmitted electron current.…”
Section: Introductionmentioning
confidence: 99%