Modified knife-edge method for current density distribution measurements in e-beam writers

Abstract

In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern.

Parametric X-ray radiation in the Smith-Purcell geometry for non-destructive beam diagnostics

“…With this we can conclude that practically under realistic experimental conditions it is impossible to observe pure SP radiation, since it is few order of magnitude less than the corresponding PXR-EAD. Nevertheless, the geometry of PXR-SPG can be exploited for the non-destructive diagnosis of the electron beam, due to its strong dependence on an electron emittance that can be used as a complement to the conventional knife-edge method [30,31]. For this reason, in Fig.…”