Measurement of the Parameters of Atmospheric‐Pressure Barrier‐Torch Discharge

Abstract

Summary: The atmospheric plasma jet system was investigated for deposition of oxide layers on polymer (kapton) substrates. The plasma in the system was excited by an RF power source working in pulse modulated mode. This modulation allowed exciting high density plasma in the active part of the duty cycle and simultaneously keeping the neutral gas in the plasma jets at the substrate sufficiently cold, thus protecting the kapton substrate from thermal damage. The atmospheric plasma jet system was tested in two configurations: as single jet system and as linear multi‐jet system with four equivalent jets. The plasma in the system was investigated by means of impedance measurements. A calibrated capacitive voltage probe and a Rogowski current coil were used for direct measurement of voltage and current RF waveforms, respectively. From these data the power deposited in the discharge and the plasma column impedance were estimated. The real part of plasma impedance was used for electron concentration ne estimation. It was found that the electron concentration in the plasma jet was about 2 × 1013 cm−3. The atmospheric plasma jet source was used for low temperature deposition of conductive oxide (ZnO) thin films on kapton, silicon and quartz glass substrates. As growth precursors for ZnO films, Zn‐acetylacetonate vapors were used. Deposited ZnO films on both kapton and quartz glass contained hexagonal crystalline phase. They were optically transparent and had an electrical conductivity σ ≈ 10−1–100 S · cm−1.

Optical evidence of strong coupling between valence-band holes andd-localized spins inZn1−xMnxO

“…The first line is a sum of A and B excitons, the second one is the C exciton appearing due to disorientation of blocks forming the film. 16 Analogous temperature evolutions have been reported for a wide excitonic line in ZnO nanocrystals. 15 As the concentration of Mn impurity increases, the excitonic line additionally broadens and shifts to higher energies.…”

A hypersonic plasma bullet train traveling in an atmospheric dielectric-barrier discharge jet

“…4,5 These plasma sources can be generated with sinusoidal excitation at 60 Hz, 6 kHz, 5,[7][8][9][10] MHz, 1,4,[11][12][13][14] and with repetitive nanosecond pulses at kilohertz. 8,15 For many of their applications, nonthermal plasma jets offer a useful practicality of separating the plasma generation region from the application region thus facilitating access to an extensive range of reaction chemistry.…”

Atmospheric‐Pressure Glow Discharge CVD of Composite Metallic Aluminium Thin Films

“…Microwave10, 11 and hollow‐cathode12, 13 AP plasma systems have also been reported. A further approach is based on dielectric barrier systems,5 in either torch14 or parallel‐plate15 arrangements. A further variant is provided by either remote, or in situ AP plasma use.…”

“…Torch configuration systems have also been applied for the deposition of materials such as In x O y , SnO x 24. and ZnO 25. In this case, area coverage is primarily achieved by translation of the substrate, possibly combined with multiple in‐line plasma jets.…”