Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder

Li, Xinghui; Shimizu, Yuki; Ito, Takeshi; Cai, Yindi; Ito, So; Gao, Wei

doi:10.1117/1.oe.53.12.122405

Cited by 26 publications

(17 citation statements)

References 17 publications

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“…Diffraction efficiency measurement results shows that the first-order diffraction efficiency reach more than 30%, which can meet the requirement of electro-optical encoders. The achievements of this research pave a way for fabrication of two-dimensional sub-m/m-order gratings for multi-axis surface encoders [11][12][13] .…”

Section: Conclusion and Discussionmentioning

confidence: 98%

Low-cost lithography for fabrication of one-dimensional diffraction gratings by using laser diodes

Zhu

Zhou

et al. 2015

SPIE Proceedings

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A low-cost lithography technology is presented in this paper for fabrication of sub-micron order one-dimensional diffraction gratings. A Lloyd's mirror interferometer which can generate stable interference fringes is used as fabrication tool. The Lloyd's mirror interferometer is composed of a mirror and a substrate coated by photoresist, which are placed by nighty degrees. A plane wave is projected onto the Lloyd's mirror and divided into two halves, one of which is directly projected onto the substrate and the other one reaches the substrate after being reflected by the mirror. These two beam interfere with each other and generate interference fringes, which are exposed onto the photoresist. After being developed, the exposed photoresist shows a one-dimensional surface-relief grating structures. In conventional lithography system based on the principle mentioned above, gas lasers, such as He-Cd laser are widely employed. The cost and footprint of such laser sources, however, are always high and bulky. A low-cost system by using cost-efficient 405 nm laser diodes is then proposed for solving these problems. A key parameter, coherence length that determines onedimensional grating width is systematically studied. A fabrication system based on the interference lithography principle and 405 nm laser diodes is constructed for evaluation of the feasibility of using laser didoes as laser source. Gratings with 570 nm pitch are fabricated and evaluated by an atomic force microscope. Experiments results show that low-cost 405 nm laser diode is an effective laser source for one-dimensional grating fabrication.

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Section: Conclusion and Discussionmentioning

confidence: 98%

Low-cost lithography for fabrication of one-dimensional diffraction gratings by using laser diodes

Zhu

Zhou

et al. 2015

SPIE Proceedings

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“…Second, because the scope of this research is focused on the design, fabrication, construction and evaluation of this proposed QFP prism, the systematical algorithm for motion determination that was illustrated in References [6][7][8][9][10][11][12][13][14][15][16] was not introduced or not employed to precisely calculate the displacement. Furthermore, because of the slight misalignment of the motion stage and the scale grating, crosstalk will inevitably be involved.…”

Section: Discussionmentioning

confidence: 99%

“…As illustrated in previous research [5,6,13], further phase delay and amplitude division of these signals are required so that the direct current components of the interference signals can be eliminated and the motion direction can be distinguished. Thus, more optics are added into this optical layout and this results the light path increasing to more than 100 mm [14].…”

Section: Design Of the Integrated Optical Prismmentioning

confidence: 99%

“…It was found in the trial production of the actual test prototype [5,12], the process of assembly and adjusting the diffractive light deflection prism is extremely complicated and difficult for the mechanical assembly stress and the influence of such factors as poor precision stability of the optical path. In order to avoid the problem that diffractive light deflection prisms need to be adjusted separately, a structure using transmission grating for diffraction light deflection is proposed, as shown in Figure 1d [13,15,16]. In this structure, the transmission grating is actually four one-dimensional transmission gratings combined.…”

Section: Design Of the Integrated Optical Prismmentioning

confidence: 99%

“…This means that the above eight diffracted beams need to be finely deflected, which determines the quality of the interference signals. In previous research, there are three proposed methods, collimation lens represented by Reference [6], separate prisms represented by Reference [5], and a home fabricated diffraction device by combining four separate one-axis line gratings in a glass substrate [13]. These methods meet the demand of the light path design and can be manufactured under the lab conditions.…”

Section: Introductionmentioning

confidence: 99%

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Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application

Shi

Xiao

et al. 2018

Applied Sciences

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In this research, a key optical component for multi-degree-of-freedom (MDOF) surface encoder was designed, fabricated and evaluated. In a MDOF grating interferometry system, there are four diffraction beams from a two-axis scale grating and reference grating, respectively. For further modulation, these beams will propagate more than 100 mm, which makes paralleling these beams necessary. In previous research, collimation lens, separate prisms and a home fabricated diffraction device by combining four separate one-axis line gratings in a glass substrate have been demonstrated. However, large power loss and assembly complicity makes these techniques less competitive. For solving this problem, this research proposed a new lens module, which is an improved type prism, quadrangular frustum pyramid (QFP) prism. The prism is designed in such a way that these four reflected beams from the grating are symmetrically incident into the prism through the upper surface, total reflected on the inner sides of the prism, and then parallel getting through the bottom surface. A prism that allows an incident beam diameter of 1 mm and four paralleling beams with a 10 mm distance between the two diffraction beams along one direction was designed, fabricated and tested. Testing results based on an entire grating interferometry system verified that the proposal in this research is greatly effective in beam paralleling in terms of less power loss and high paralleling and greatly reduces the assembly complicity, which will eventually be beneficial for grating interferometry application.

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A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Zheng

Feng

Zhang

et al. 2020

Int J Adv Manuf Technol

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Error compensation has become an important means of improving the manufacturing and processing accuracy of computer numerical control (CNC) machine tools. Quick and precise measurement of the various geometric motion errors (GMEs) of CNC machine tools is crucial. We propose a novel laser method for the efficient and direct high-precision measurement of the 21 GMEs of a three-axis CNC machine tool, or three linear axes of a five-axis tool. A corresponding system was developed, comprising a fiber-coupled laser unit, sensor head, target unit, and beam-steering unit. The beam-steering unit was designed to perform high-accuracy 90°rotation of the measuring beam, and the target unit was designed to be sensitive to 18 GMEs of the three linear axes. Stability, repeatability, and comparison experiments were conducted to verify the performance of the proposed system. The results showed that the stability of the position error measurement is ± 6.3 nm. For straightness error measurement, the stability, repeatability error, and residual are within ± 60.3 nm, ± 0.5 μm, and ± 0.7 μm, respectively. These are within ± 0.12 arcsec, ± 0.5 arcsec, and ± 0.5 arcsec for the pitch and yaw measurements, and within ± 0.37 arcsec, ± 1.5 arcsec, and ± 1.0 arcsec for the roll measurements, respectively. For squareness error measurement, the repeatability error and residual are within ± 0.6 arcsec and ± 1.6 arcsec, respectively. Compared with a laser interferometer, the proposed system can measure the 21 GMEs of a three-axis machine tool with one-step installation. Without accuracy loss, the measurement efficiency is approximately 45 times higher than that of a laser interferometer, thus providing a new quick and accurate measurement method of GMEs and error compensation of CNC machine tools.

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Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder

Cited by 26 publications

References 17 publications

Low-cost lithography for fabrication of one-dimensional diffraction gratings by using laser diodes

Low-cost lithography for fabrication of one-dimensional diffraction gratings by using laser diodes

Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

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