Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application

Abstract

In this research, a key optical component for multi-degree-of-freedom (MDOF) surface encoder was designed, fabricated and evaluated. In a MDOF grating interferometry system, there are four diffraction beams from a two-axis scale grating and reference grating, respectively. For further modulation, these beams will propagate more than 100 mm, which makes paralleling these beams necessary. In previous research, collimation lens, separate prisms and a home fabricated diffraction device by combining four separate one-axis line gratings in a glass substrate have been demonstrated. However, large power loss and assembly complicity makes these techniques less competitive. For solving this problem, this research proposed a new lens module, which is an improved type prism, quadrangular frustum pyramid (QFP) prism. The prism is designed in such a way that these four reflected beams from the grating are symmetrically incident into the prism through the upper surface, total reflected on the inner sides of the prism, and then parallel getting through the bottom surface. A prism that allows an incident beam diameter of 1 mm and four paralleling beams with a 10 mm distance between the two diffraction beams along one direction was designed, fabricated and tested. Testing results based on an entire grating interferometry system verified that the proposal in this research is greatly effective in beam paralleling in terms of less power loss and high paralleling and greatly reduces the assembly complicity, which will eventually be beneficial for grating interferometry application.

Special Issue on Precision Dimensional Measurements

“…In the area of grating diffraction-based interferometer, a double diffraction heterodyne interferometer was developed by Chang [26]. Li et al of Tsinghua University designed two innovate key components for planar grating interferometers, namely the Lloy's mirror [27] and the prism module [28].…”

A Review: High-Precision Angle Measurement Technologies

“…Overall, current measurement schemes are often not limited to a single measurement scheme and generally require multiple devices to work together [ 14 ]. Single-device multi-degree-of-freedom (DOF) measurement [ 15 , 16 , 17 , 18 , 19 , 20 , 21 ] or multi-device collaborative work [ 22 ] is currently a research hotspot, which can achieve the complete construction of position and orientation information [ 23 ]. At the same time, modular design can be better integrated into other devices to achieve angle detection and correction faster.…”

Long binary coding design for absolute positioning using genetic algorithm

“…Absolute position detection is one of the critical requirements for grating interferometers used in high-precision machine tools [27]. It enables the retrieval of the original working position in the event of unexpected downtime, thereby minimizing the production of scrap and defective products with a compact module [28] and ability of multiple-degree-of-freedom measurement [29,30]. Overall, precision measurement methods play an indispensable role in enhancing manufacturing processes, ensuring accuracy, and optimizing efficiency in high-end manufacturing industries [31][32][33][34][35].…”