Measurement and Evaluation of the Gas Density and Viscosity of Pure Gases and Mixtures Using a Micro-Cantilever Beam

Badarlis, A.; Pfau, Axel; Kalfas, A. I.

doi:10.3390/s150924318

Cited by 27 publications

(15 citation statements)

References 29 publications

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“…Hence, the AFM-MCS shows much less direct-thermal parasitic crosstalk effects. Nevertheless, AFM-MCS cantilever has a smaller amplitude (~19 mV) and a lower Q factor of 189 (which is determined by gradient phase fitting [36]) compared to the EtPCS, whose amplitude and quality factor (Q) amount to ~0.43 V and ~2000, respectively. .…”

Section: Atomic Force Microscopy Micro-cantilever Sensor (Afm-mcs)mentioning

confidence: 99%

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Setiono

Bertke

Nyang’au

et al. 2020

Sensors

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In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm3 and 300 × 100 × 4 µm3, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.

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Section: Atomic Force Microscopy Micro-cantilever Sensor (Afm-mcs)mentioning

confidence: 99%

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Setiono

Bertke

Nyang’au

et al. 2020

Sensors

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“…The cantilevers are mounted on a small cantilever PCB with a 10-pin connector on its lower side. In our setup, the bare cantilever is used to measure the density and the viscosity of the gas as reported by Badarlis et al [8] or Huber et al [9]; and the functionalized counterpart is used to measure water vapor at ppm level thanks to the hydrophilic porous layer deployed on top of the cantilever surface, as reported for example by Urbiztondo et al [10]. [7] used in this study.…”

Section: Sensor Printed Circuit Board (Pcb) and Gas-measuring Chambermentioning

confidence: 99%

A Multiparameter Gas-Monitoring System Combining Functionalized and Non-Functionalized Microcantilevers

Huber¹,

Pina

Morales

et al. 2020

Micromachines

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The aim of the study is to develop a compact, robust and maintenance free gas concentration and humidity monitoring system for industrial use in the field of inert process gases. Our multiparameter gas-monitoring system prototype allows the simultaneous measurement of the fluid physical properties (density, viscosity) and water vapor content (at ppm level) under varying process conditions. This approach is enabled by the combination of functionalized and non-functionalized resonating microcantilevers in a single sensing platform. Density and viscosity measuring performance is evaluated over a wide range of gases, temperatures and pressures with non-functionalized microcantilevers. For the humidity measurement, microporous Y-type zeolite and mesoporous silica MCM48 are evaluated as sensing materials. An easily scalable functionalization method to high-throughput production is herein adopted. Experimental results with functionalized microcantilevers exposed to water vapor (at ppm level) indicate that frequency changes cannot be attributed to a mass effect alone, but also stiffness effects dependent on adsorption of water and working temperature must be considered. To support this hypothesis, the mechanical response of such microcantilevers has been modelled considering both effects and the simulated results validated by comparison against experimental data.

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“…The acting forces depend on the ratio of thickness to width of the plate, the size ratio of the oscillation amplitude to the characteristic plate dimension (KC, Keulegan-Carpenter number) and the frequency-dependent normalised Reynolds number (see Eq. 16) (Egorov et al, 2014). In Sader (1998), this problem was solved for a thin plate oscillating in a quiescent fluid with small amplitude, and the influence of the fluid on the resonance frequency and the quality factor was derived.…”

Section: Introductionmentioning

confidence: 99%

“…In Sader (1998), this problem was solved for a thin plate oscillating in a quiescent fluid with small amplitude, and the influence of the fluid on the resonance frequency and the quality factor was derived. Badarlis et al (2015) used these relations to investigate the determination of the density and viscosity of different gases and binary gas mixtures by means of microcantilevers. But this measuring method was only investigated for measurements in quiescent gases.…”

Section: Introductionmentioning

confidence: 99%

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

Stauffenberg

Durstewitz

Hofmann

et al. 2020

J. Sens. Sens. Syst.

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Abstract. Microcantilevers offer a wide range of applications in sensor and measurement technology. In this work cantilever sensors are used as flow sensors. Most conventional flow sensors are often only calibrated for one type of gas and allow an analysis of gas mixtures only with increased effort. The sensor used here is a cantilever positioned vertically in the flow channel. It is possible to operate the sensor in dynamic and static mode. In the dynamic mode the cantilever is oscillating. Resonance frequency, resonance amplitude and phase are measured. In static mode, the bending of the cantilever is registered. The combination of the modes enables the different measured variables to be determined simultaneously. A flow influences the movement behaviour of the sensor, which allows the flow velocity to be deduced. In addition to determining the flow velocity, it is also possible to detect different types of gas. Each medium has certain properties (density and viscosity) which have different effects on the bending of the sensor. As a result, it is possible to measure the mixing ratio of a known binary gas mixture and their flow velocity simultaneously with a single sensor. In this paper this is investigated using the example of the air–carbon-dioxide mixture.

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Measurement and Evaluation of the Gas Density and Viscosity of Pure Gases and Mixtures Using a Micro-Cantilever Beam

Cited by 27 publications

References 29 publications

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

A Multiparameter Gas-Monitoring System Combining Functionalized and Non-Functionalized Microcantilevers

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

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