Measurement and estimation of temperature rise in TEM sample during ion milling

Study of temperature rise during focused Ga ion beam irradiation using nanothermo-probe

“…Ion and electron beam induced local heating [1,2] leads to variety of interesting effects such as bending of nanopillars [3], diffusion of substrate atoms into the nanostructures [4], improvement in the adhesion of thin films on substrates [5][6][7] and focused ion beam lithography for MOSFET devices [8]. Hence the experimental and theoretical estimation of the local temperature rise upon ion/electron beam irradiation is very important to understand all theses effects.…”

Effect of the Ca content on the microstructural evolution of Ca containing AZ31 cast alloys

“…As the samples used in the present study were not aged, the existence of planar faults may have been caused by the ion milling that occurred during the TEM sample preparation process. This milling can increase the temperature of the samples until it exceeds 300°C [17,18]. Further investigations are required in conjunction with the stability of the C36 Laves phase and phase transitions in AZ31-xCa alloys.…”

Microstructural Investigation of Bilayer Growth of In- and Ga-Rich InGaN Grown by Chemical Vapor Deposition

“…Incorporation of artifacts by thermal load has been previously reported for specimens prepared for TEM analysis. 15 Extreme care was taken to reduce thermal damage during sample preparation. Once the sample went through the conventional preparation steps of gluing, cutting, and grinding with a minimal thermal load, ion milling was done using the lowest ion energy and highest incidence angle of ions possible.…”