Maze routing with OPC consideration

As IC process geometries scale down to the nanometer territory, the industry faces severe challenges of manufacturing limitations. To guarantee yield and reliability, physical design for manufacturability and reliability has played a pivotal role in resolution and thus yield enhancement for the imperfect manufacturing process. In this paper, we introduce major challenges arising from nanometer process technology, survey key existing techniques for handling the challenges, and provide some future research directions in physical design for manufacturability and reliability.

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Recent Research and Emerging Challenges in Physical Design for Manufacturability/Reliability

Lin

Tsai

Lee

et al. 2007

2007 Asia and South Pacific Design Automation Conference

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An Image Processing Approach to Solve Labyrinth Discovery Robotics Problem

Rahnama

Elçi

Metani

2012

2012 IEEE 36th Annual Computer Software and Applications Conference Workshops

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SAT based multi-net rip-up-and-reroute for manufacturing hotspot removal

Yang

Cai

Zhou

et al. 2010

2010 Design, Automation &Amp; Test in Europe Conference &Amp; Exhibition (DATE 2010)

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Abstract-Manufacturing hotspots are the layout patterns which cause excessive difficulties to manufacturing process. Design rules are effective at handling sizing/spacing induced hotspots, but are inadequate at dealing with topological hotspots. In wire routings, existing approaches often remove the hotspots through iteratively ripping up and rerouting one net at a time guided by litho-simulations. This procedure can be very timeconsuming because litho-simulation is typically very slow and the rerouting may result in new hotspots due to its heuristic nature. In this paper, we propose a new approach for improving the efficiency of hotspot removal. In our approach, multiple nets in each hotspot region are simultaneously ripped up and rerouted based on Boolean satisfiability (SAT). The hotspot patterns, which are described and stored in a pre-built library, are forbidden to appear in the reroute through SAT constraints. Since multiple nets are simultaneously processed and SAT can guarantee to find a feasible solution if it exists, our approach can greatly accelerate the convergence on manufacturability. Experimental results on benchmark circuits show that our approach can remove over 90% of the hotspots in less than one minute on circuits with more than 20K nets and hundreds of hotspots.

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Maze routing with OPC consideration

Cited by 15 publications

References 4 publications

Recent Research and Emerging Challenges in Physical Design for Manufacturability/Reliability

Recent Research and Emerging Challenges in Physical Design for Manufacturability/Reliability

An Image Processing Approach to Solve Labyrinth Discovery Robotics Problem

SAT based multi-net rip-up-and-reroute for manufacturing hotspot removal

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