Matching Network-Boosted 36% Scaln Pmut Linear Array

Giribaldi, Gabriel; Soukup, Bernard Herrera; Simeoni, Pietro; Colombo, Luca; Rinaldi, Matteo

doi:10.1109/mems51670.2022.9699772

Cited by 3 publications

(3 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A potential solution comes from the use of piezoelectric resonators which can have very high quality factors and, especially if utilizing MEMS resonators, can have miniature form factors and be potentially integrated into the PMUT fabrication process flow. In recent works, MEMS resonators have been utilized to provide passive gains on capacitive loads in RF circuits [24], [25] and the concept has also been applied to increase the receive and transmit sensitivity of PMUT arrays through a voltage-boosting effect [14], [26]. In a similar manner, resonators can potentially be utilized to improve the extracted power from a PMUT array by cancelling out the capacitive reactance.…”

Section: Matching Networkmentioning

confidence: 99%

“…In relation to the quality factor of the resonator, [14] details circuit simulations of the impact of the resonator's Q on the receiving voltage sensitivity. It was found to be proportional to this parameter.…”

Section: Resonator Matchingmentioning

confidence: 99%

“…A common approach to mitigate this effect is to use inductors, cancelling out the reactance at the specific operating frequency. Recent work has demonstrated the potential of utilizing resonators to provide both this matching effect as well as voltage-boosting [14].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Scandium-Doped Aluminum Nitride PMUT Arrays for Wireless Ultrasonic Powering of Implantables

Herrera

Simeoni

Giribaldi

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

Self Cite

View full text Add to dashboard Cite

The present work reports on the novel usage of Scandium-doped Aluminum Nitride (AlScN) PMUT arrays for enhanced power transfer in implantable applications. Optimization considerations were explored for the PMUT array towards high performance. The transmission metric, compared to identical arrays based on Aluminum Nitride (AlN), showed a 25dB increase. Power transfer measurements also confirmed a considerable increase as compared to previous work based on AlN. Different matching strategies were explored to maximize the output power including inductor conjugate matching and matching utilizing resonators in series and parallel topologies. A full characterization of the transferred power versus incident acoustic intensity on the array revealed transmission of power levels of several milliwatts for intensities below the Food and Drug Administration's (FDA) limit. The performance of the array, as compared with other implementations with a range of frequencies, dimensions and input acoustic intensities was bench-marked through the use of the conversion efficiency as the figure-of-merit. The practical applicability of the system, utilizing a realistic tissue phantom as the medium, was proven by interfacing with a commercially available boost converter to obtain a rectified voltage and power levels sufficient for powering and charging intra-body electronics.

show abstract

Section: Matching Networkmentioning

confidence: 99%

Section: Resonator Matchingmentioning

confidence: 99%