This paper describes the characterization of conductive PDMS (CPDMS) composites. Composite have been achieved by filling the PDMS with CarbonBlack (CB). Two different methods were used to prepare the CPDMS composites: (A) direct mixing of CB with PDMS (CB-PDMS); (B) dissolving of CB in methanol before mixing with PDMS (CB-Methanol-PDMS). At a certain critical CB concentration, called percolation threshold, the membranes get conductive. Membranes of CPDMS (thickness ≈ 100µm) have been fabricated. CPDMS membranes of method (B) show a smoother surface profile as membranes of method (A). By means of a two–point resistivity measurement, the electrical resistance of CPDMS membranes was measured. With an increase of the CB concentration, the resistance decreases. Membranes of method (B) show a low percolation threshold and a low surface resistivity. Effects of pressure and temperature on the membrane resistance were investigated, too. Around the percolation threshold, the resistance shows the highest sensitivity on pressure and temperature variations. The Young’s modulus of CPDMS membranes exponentially increase with an increase of the CB concentration.
Scandium-alloyed aluminum nitride (AlScN) is a potential material for micro-electromechanical systems because of its unique advantages, such as strong piezoelectric effect and high thermal stability. However, issues related to its stability and interaction with other materials in multilayer systems require investigation. The formation of new phases at the interface between piezomaterial and electrode material can lead to the device failure. In this study, multilayer structures Si substrate/AlN/Ti-Mo/Al 0.8 Sc 0.2 N/top electrode (TE) were studied after annealing at a wide range of temperatures and durations. Four different TE materials (i.e. Al, AlSi (1%), Mo/Al, and Mo) were examined to determine the most reliable electrode material for the structure. The phase stability, interfacial quality, and piezoelectric response of the multilayer systems after thermal annealing were investigated. The structure with Mo TE layer was stable after annealing at 800 • C for 300 h and at 1000 • C for 100 h. None of the structures formed any new phases at the interface between the electrode layer and AlScN. The transverse piezoelectric coefficient (e 31,f) was determined for Al 0.8 Sc 0.2 N before and after annealing. The absolute value of the e 31,f was −1.39 C/m 2 for as-deposited structure and −1.67 C/m 2 for the same structure annealed for 300 h at 800 • C.
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