2009
DOI: 10.1109/tie.2009.2021173
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Manufacturing of a Hybrid Acoustic Transmitter Using an Advanced Microassembly System

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Cited by 23 publications
(4 citation statements)
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“…Micropositioning has been regarded as one of pivotal technologies in many fields, such as bioengineering [1], optical microscope [2], printed electronics [3], micromanipulation [4], microassembly and micromachining [5][6][7]. Nevertheless, conventional mechanisms can meet the the requirements of precision position in these fields for their inevitable friction, backlash and so on.…”
Section: Introductionmentioning
confidence: 99%
“…Micropositioning has been regarded as one of pivotal technologies in many fields, such as bioengineering [1], optical microscope [2], printed electronics [3], micromanipulation [4], microassembly and micromachining [5][6][7]. Nevertheless, conventional mechanisms can meet the the requirements of precision position in these fields for their inevitable friction, backlash and so on.…”
Section: Introductionmentioning
confidence: 99%
“…Microrobotic assembly demonstrates both high flexibility and precision through contact micromanipulation in an open environment with no need of electrical or optical interference [14][15][16]. By employing a micrometer-sized manipulator tip, every micromodule can be mechanically picked up and placed; the systems can thus achieve bottom-up assembly of biomimetic structure with microstructural features.…”
Section: Introductionmentioning
confidence: 99%
“…Micropositioning stages are essential devices in micro/nano applications such as nano scale profile measurement, 1 nanoimprint lithography, 2,3 micromachining, 4,5 microassembly, 6,7 etc. In these applications, the micropositioning stages are required to possess large travel ranges with high positioning accuracy.…”
Section: Introductionmentioning
confidence: 99%