Design, analysis and testing of a novel decoupled 2-DOF flexure-based micropositioning stage

Yang, Shuai; Chen, Weihai; Liu, Jingmeng; Chen, Wenjie

doi:10.1088/1361-6439/aa70b9

Cited by 28 publications

(13 citation statements)

References 26 publications

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“…During the literature review, the structure of micropositioning stages introduced in previous literatures have some common characteristics [35]- [39]. Namely, different parts in micro-positioning stages have a specific function.…”

Section: A Theoretical Aspectsmentioning

confidence: 99%

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

et al. 2019

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Micro-positioning stages, which are capable to meet the emerging industrial trend for performing various kinds of micro-manipulation and micro-assembly tasks are the crucial tools to miniaturize the products under ultra-high precision. The current main practice is to specifically tailor a monolithic positioning stage design for one kind of micro-manipulation application. However, the design and fabrication of such a specific flexure-based micro-positioning stage are expensive in both the time and financial investment. In order to increase the flexibility and functionality of micro-positioning stages, this paper proposes a novel reconfigurable planar micro-positioning stages platform based on different function modules. A functional model-based approach is developed to divide one micro-positioning stage into a set of functionally independent sub-models, which allows flexible composition resulting in an adjustable new stage. The robustness of the proposed platform is demonstrated using some typical micro-positioning stages benchmarking cases. The effectiveness of assembly using flexible function modules is verified to show the benefits of the proposed design platform for reconfigurable micro-positioning stages. INDEX TERMS Reconfigurable micro-positioning stage, function modules, modular, low cost.

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Section: A Theoretical Aspectsmentioning

confidence: 99%

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

et al. 2019

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“…Some researchers have developed multi-degreeof-freedom (DOF) precision stages based on this technology. 8,9 These multi-DOF stages are usually adopted parallel or series combination structure. For parallel structure, the stage has a compactly size, and all DOFs act on the same moving surface without cumulative error.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage

Jin

et al. 2021

Advances in Mechanical Engineering

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In order to solve the low coupling displacement and high crosstalk error of multi-dimensional micro-displacement stage, a two-dimensional micro-displacement stage based on flexure hinges and piezoelectric ceramics is designed and analyzed. The whole stage adopts a nested parallel structure. The design parameters of flexure hinges are calculated using Pseudo-rigid body model. Those parameters are confirmed by a simulation before manufacturing the stage. A double frequency laser interferometer is used for measuring the displacement and crosstalk error of the stage when it’s driven. The experimental results show that the maximum crosstalk error of the two-dimensional displacement platform within full travel is 0.98%, the displacement coupling rate approaches 91.4%, and the remaining trajectory deviation caused by hysteresis asymmetry can be reduced to 0.79%.

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“…On the basis of the working principle, existing piezoelectric actuators are classified into direct driving [8], [9], ultrasonic [10], [11], inchworm [12], [13], inertial [14], [15], and other types. Zhu et al [16] proposed a piezoelectric direct driving-type actuator that clamps directly through a…”

Section: Introductionmentioning

confidence: 99%

Design and Experimental Performance of a Novel Piezoelectric Inertial Actuator for Magnetorheological Fluid Control Using Permanent Magnet

Wang

Shen

et al. 2019

IEEE Access

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A piezoelectric inertial actuator for magnetorheological fluid (MRF) control using permanent magnet is proposed in this paper. The stable linear motion of the actuator with high controllability is obtained by integrating the piezoelectric vibrator and MRF control structures. The magnetic field distribution between yoke teeth is analyzed by finite element analysis. Laser displacement measuring and scanning vibrometer systems are built to test the output performance of the proposed actuator. The experimental results show that the actuator with MRF control structure has good controllability, with a minimum step displacement of 0.0204 µm and maximum moving speed and a load of 31.15 µm/s and 800 g, respectively.The experiments confirm that the MRF control structure can be used to control the piezoelectric actuator with high controllability and increase the stability of output displacement.

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Design, analysis and testing of a novel decoupled 2-DOF flexure-based micropositioning stage

Cited by 28 publications

References 26 publications

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage

Design and Experimental Performance of a Novel Piezoelectric Inertial Actuator for Magnetorheological Fluid Control Using Permanent Magnet

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