A decoupled 2-DOF flexure-based micropositioning stage with large travel ranges

Abstract

SUMMARYIn this paper, a new flexure-based micropositioning stage (FMPS) is proposed to achieve decoupled XY translational motions and large travel ranges. The stage consists of four independent kinematic chains, each comprising two flexure-beam prismatic joints. The mechanism with such a special topological structure enables the motions of the platform strictly along XY axes and minimizes the parasitic rotation in theta axis. The kinematics and dynamics analysis of the mechanism are conducted to evaluate the performance of the mechanism in terms of travel range, parasitic motions, linearity, as well as natural frequency. According to the developed models, a parameter optimization of the mechanism is performed under the condition of the maximum travel range. The finite element simulation is carried out to examine the mechanical performance and the theoretical models. The experimental results show that the proposed FMPS possesses a workspace of 600 × 600 μm2, a relative coupling error of 0.6%, and the natural frequencies of 209.7 Hz and 212.4 Hz for the first two modes.

Design and characteristic analysis of an aerostatic decoupling table for microelectronic packaging

“…Integrating equation (15) with the boundary conditions of y ¼ 0, w ¼ 0; y ¼ h, w ¼ 0, then the following equation can be expressed as…”

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Design and control of an x-y-θz parallel piezoelectric nanopositioning stage with a large moving platform

“…To avoid the problems of friction, lubrication, and clearance caused by traditional motion pairs, flexure hinges are usually used to transmit force and displacement (Cai et al, 2016; Zhu et al, 2016a). At present, the commonly used actuators are voice coil motors (VCMs) (Zhang and Xu, 2018, 2019), electromagnetic actuators (Sun et al, 2014), piezoelectric actuators (PZTs) (Liu and Li, 2016; Ting et al, 2011), and so on. PZTs have been widely used because of their advantages: no noise, no heat, fast response, and high displacement resolution.…”

Design, analysis and testing of a novel decoupled 2-DOF flexure-based micropositioning stage

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