Design and characteristic analysis of an aerostatic decoupling table for microelectronic packaging

Abstract

This paper presents a novel 2-DOF XY table with high-precision positioning to improve the efficiency and precision of micro-electro-mechanical system packaging. The XY table, which is supported by aerostatic bearings to realize high-precision positioning motion, is directly driven by two linear voice coil actuators. The motion decoupling between the X-and Y-axes is realized through a novel aerostatic decoupling mechanism, by which the mass and inertia of motion parts are reduced significantly. The mechanical structure of the XY table is designed and the decoupling mechanism is studied. Based on the Navier–Stokes equation, the influences of orifice diameter and lubrication gap on the carrying capacity as well the static stiffness of the aerostatic bearings are analyzed. The parameters of the aerostatic bearings are determined by single factor method. Using the finite element method, the static, modal, and transient analyses of the developed positioning table are carried out to investigate the characteristics of the positioning table. The results show that the positioning table provides good performance and can also provide important information for the optimization design and control of this kind of the positioning table.

Voice coil motor-driven multi-DOF compliant parallel micropositioning stage based on a large range beam-based spherical hinge and fully symmetrical layout

“…Hopkins et al proposed a new 6-axis bent-blade-flexure-based positioner, called a hexblade positioner, which could achieve high speeds over large ranges with high precision [35]. The conventional 2-DOF decoupled mechanism has a decoupling mechanism and symmetrical configuration that can be used to realize complete input and output decoupling in two directions [36][37][38][39][40][41]. In contrast, most current designs of 3/6-DOF micropositioning stages with a hexapod structure have complex kinematics, large crosstalk, and varying stiffness according to the pose of the moving platform.…”

Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage

“…The piezoelectric actuator (PZT) has the advantages of large driving force, high stiffness, high resolution and fast driving response, which is often used to actuate the compliant mechanism to achieve micro-positioning stage for various application requirements [1][2][3][4]. When the micro-positioning stage is tracking high speed trajectory, the amplitude and phase errors will occur inevitably [5,6].…”

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

“…ICRO/NANO positioning system has broad applications in biological manipulation, optical fiber alignment, nano-imprint lithography, scanning probe microscopes, micro/nano assembly and etc [1][2][3][4][5][6]. Compared to conventional macro positioning system, compliant micro/nano positioning system can realize nanometric resolution through the elastic deformation of flexure hinges, which has the advantages of no friction [7][8][9][10][11], no backlash, no lubrication and easy fabrication, whereas the travel range is usually limited from a few microns to several millimeters.…”