This paper presents a novel decoupled two degrees of freedom (2-DOF) translational parallel micro-positioning stage. The stage consists of a monolithic compliant mechanism driven by two piezoelectric actuators. The end-effector of the stage is connected to the base by four independent kinematic limbs. Two types of compound flexure module are serially connected to provide 2-DOF for each limb. The compound flexure modules and mirror symmetric distribution of the four limbs significantly reduce the input and output cross couplings and the parasitic motions. Based on the stiffness matrix method, static and dynamic models are constructed and optimal design is performed under certain constraints. The finite element analysis results are then given to validate the design model and a prototype of the XY stage is fabricated for performance tests. Open-loop tests show that maximum static and dynamic cross couplings between the two linear motions are below 0.5% and -45 dB, which are low enough to utilize the single-input-single-out control strategies. Finally, according to the identified dynamic model, an inversion-based feedforward controller in conjunction with a proportional-integral-derivative controller is applied to compensate for the nonlinearities and uncertainties. The experimental results show that good positioning and tracking performances are achieved, which verifies the effectiveness of the proposed mechanism and controller design. The resonant frequencies of the loaded stage at 2 kg and 5 kg are 105 Hz and 68 Hz, respectively. Therefore, the performance of the stage is reasonably good in term of a 200 N load capacity.
Abstract:The remote center compliance (RCC) mechanism is of great use for practical designs, especially if a pure rotation about a virtual point is required. The analysis of compliance properties and rotational precision for RCC mechanisms are very important for mechanical design in applications where precision is required. This paper formulates an analytical method for the compliance and rotational precision calculations of a class of RCC mechanisms, combined in parallel with two round beam-based isosceles-trapezoidal flexural pivots. The analytical model of the mechanism is established based on the stiffness matrix method to directly obtain the compliance factors that completely define the elastic response of the mechanism. The rotational precision of the mechanism-That is, the position of rotation center-Is then derived using screw theory and a compliance matrix. The validity of this model is demonstrated using finite element analysis simulation and experimental tests. The results of both simulation and experiment verify that the analytical model has high accuracy and promising practical applications. Moreover, the influences of the geometry parameters on the compliance factors and the center shifts are also graphically evaluated and discussed using the analytical model. The results in this paper provide an effective configuration and analytical method for the design and optimization of RCC mechanisms, and are of great practical significance.
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