Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage

Abstract

This study focuses on a piezo-actuated two-degrees-of-freedom (2-DOF) decoupled compliant micro-positioning stage driven by a novel compound bridge-type amplification mechanism embedded with Scott-Russell mechanism. According to the system identification, the transfer functions of two working directions are obtained. Both of the measured dynamic cross couplings between them are also lower than −40 dB, demonstrating that the single-input-single-output control strategy can be adopted reasonably. Based on the identified frequency response, a fractional order proportional-integral (FOPI) controller is designed for the 2-DOF compliant micro-positioning stage. Compared with the integer order proportional-integral (IOPI) controller using same parameters, the amplitude error of the FOPI controller is 2% lower than that of IOPI controller. Additionally, a fractional order zero phase error controller (FOZPETC) is designed by obtaining the inverse of the fractional order closed-loop system in a large frequency range. And the gain of the corrected control system is 1 in a wide frequency band to eliminate the phase error in the close-loop control system. Finally, using the compound control strategy of FOZPETC+FOPI, a series of trajectory tracking tests are carried out on the proposed novel 2-DOF compliant micro-positioning stage. All the experimental results prove that the designed controller can achieve good positioning and tracking performance of the micro-positioning stage, and confirm the effectiveness of the compound control strategy of FOZPETC+FOPI.

Sliding-Mode Active Disturbance Rejection Control for Electromagnetic Driven Compliant Micro-Positioning Platform

“…It is true that the micro-positioning platform has a good application prospect because its compact structure, large stroke, high precision and integrated structure [1][2][3][4]. However, the micro-positioning platform has the problems of accumulation errors and low motion resolution [5,6]. In particular, the micro-positioning platform driven by voice coil motor, which uses the Lorentz force principle and has an excellent performance in the field of micropositioning technology because it can enable long stroke and high-precision positioning requirements, has recently become a research hotspot [7,8].…”

Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages

“…Several actuation mechanisms have been utilized to drive MEMS-based micropositioning stages, such as shape memory alloy [5], piezoelectric [6], electrostatic [7], electromagnetic [8], electrothermal [9], and electroactive polymers [10]. However, micropositioning stages that utilize such actuation methods (piezoelectric actuation in most high-precision cases) require a complex and expensive fabrication process that is not suitable for batch fabrication [11,12]. In addition, in several applications, micropositioning stages are required to perform largestroke manipulations [13,14], which is a challenging task that requires displacement amplification when using the aforementioned actuation approaches [15,16].…”