Magnetostriction and volume magnetostriction of sputtered Tb20Fe24Co56 film

Huang, Yi-Te; Ono, Takahito

doi:10.1088/2053-1591/acfd0d

Cited by 3 publications

(1 citation statement)

References 45 publications

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“…It is expected that the generated force by SVE is proportional to the magnetization, and also proportional to the flowing charge current (Supplementary Note 1). This TFC film has an easy axis of magnetization in the out-of-plane direction due to the stress field, and the in-plane magnetization is proportional to the magnetic field within the measured range [27]. In general, the relationship between force F and tensile volumetric strain in a diaphragm constrained around its perimeter is given by = −2 , where c is the modulus of volume elasticity of the magnetic material, A is the area of the diaphragm.…”

Section: Resultsmentioning

confidence: 99%

Actuation performance of a microstructure with spin-current volume effect

Ono,

Huang,

Suzuki

et al. 2023

Preprint

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In this work, the actuation of micromechanical structures based on spin-current volume effect (SVE) using an amorphous magnetic film of Tb20Fe24Co56 (TFC) with volume magnetostriction (VM) is demonstrated, and the actuation performances are evaluated. A 2 mm-diameter circular polyimide diaphragm coated with thin TFC/non-magnetic metal (NM) films is prepared as the micromechanical structure, and Pt, Cu, and W are used as the NM film. When an AC charge current flows through the TFC/NM film on the diaphragm under an external magnetic field in the diaphragm plane and orthogonal to the charge current, an AC spin-current flows in the NM film due to the spin-Hall effect. In the SVE, the spin-current transports angular momentum from the NM to TFC films, which modulates the magnetization fluctuation of the TFC film due to the spin-transfer torque, causing the volume modulation based on spin-lattice coupling. Thus, this SVE can induce the mechanical actuation of micromechanical structures. The force generated by the SVE actuation is evaluated from the mechanical resonance of the diaphragm, and it is found that the power density of the diaphragm actuator with the TFC/Pt films is larger than 1.17×106 W/m3 at 20 mA peak-to-peak AC current under 0.72 T magnetic field. This SVE is effective as a new actuation mechanism for microsystems.

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Section: Resultsmentioning

confidence: 99%

Actuation performance of a microstructure with spin-current volume effect

Ono,

Huang,

Suzuki

et al. 2023

Preprint

Self Cite

View full text Add to dashboard Cite

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Actuation of microstructures with spin-current volume effect

Huang,

Suzuki,

Arisawa

et al. 2024

Commun Eng

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Microactuators are essential for advances in micro-optics, ultrasonic transducers and microsensors, and there is a growing demand for miniaturization and improved power. Here we demonstrate the actuation of micromechanical structures based on spin-current volume effect using an amorphous magnetic film of TbFeCo with volume magnetostriction. A 2 mm-diameter circular polyimide diaphragm coated with thin TbFeCo/non-magnetic metal films is prepared as the micromechanical structure. When an alternating charge current flows through the TbFeCo/non-magnetic metal films on the diaphragm under an external magnetic field orthogonal to the charge current, an alternating spin-current flows in the non-magnetic metal film due to the spin-Hall effect. In the spin-current volume effect, the spin-current transports angular momentum from the non-magnetic metal to TbFeCo film, and the spin-transfer torque modulates the magnetization fluctuation of the TbFeCo film, causing the diaphragm to vibrate due to spin-lattice coupling. The power density of the TbFeCo/Pt films actuator is larger than 1.17 × 106 W m−3 at 20 mA charge current under 7.2 kOe magnetic field. This value is much higher than that of various existing film-type microactuators. This spin-current volume effect is effective as a new actuation mechanism for microactuators used in micro-optical systems, acoustic diagnostic equipment, and micro-fluidic systems etc.

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A resonant magnetic microsensor based on magnetic torque with piezoresistive readout

Zhao,

Toda,

Ono

2024

Applied Physics Letters

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Magnetic sensors with high sensitivity are critical for various technological applications. This paper presents a highly sensitive magnetic sensor based on magnetic torque. The sensor comprises a silicon cantilever with a micro-pillared soft magnet at its end. A piezoresistive strain sensing element is integrated into the silicon cantilever for detecting vibration signals. The prototype of the resonant magnetic sensor is designed, fabricated, and evaluated. When an alternating magnetic field, generated by a coil, is applied to the cantilever, the micro-pillared magnet undergoes pendulum-like vibrations due to magnetic torque. Additionally, the application of the alternating magnetic field, which causes the external magnetic field to change the effective spring constant of the silicon cantilever, results in a change in resonant frequency. The evaluation results demonstrate that the fabricated magnetic sensor achieves a maximum sensitivity of 114.02 Hz/mT and a minimum detectable magnetic field of 35.7 nT. These findings suggest the sensor's potential for high-sensitivity magnetic field measurements in various applications.

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Magnetostriction and volume magnetostriction of sputtered Tb₂₀Fe₂₄Co₅₆ film

Cited by 3 publications

References 45 publications

Actuation performance of a microstructure with spin-current volume effect

Actuation performance of a microstructure with spin-current volume effect

Actuation of microstructures with spin-current volume effect

A resonant magnetic microsensor based on magnetic torque with piezoresistive readout

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