A resonant magnetic microsensor based on magnetic torque with piezoresistive readout
Zhijian Zhao,
Masaya Toda,
Takahito Ono
Abstract:Magnetic sensors with high sensitivity are critical for various technological applications. This paper presents a highly sensitive magnetic sensor based on magnetic torque. The sensor comprises a silicon cantilever with a micro-pillared soft magnet at its end. A piezoresistive strain sensing element is integrated into the silicon cantilever for detecting vibration signals. The prototype of the resonant magnetic sensor is designed, fabricated, and evaluated. When an alternating magnetic field, generated by a co… Show more
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