Actuation performance of a microstructure with spin-current volume effect
Takahito Ono,
Yi-Te Huang,
Kenta Suzuki
et al.
Abstract:In this work, the actuation of micromechanical structures based on spin-current volume effect (SVE) using an amorphous magnetic film of Tb20Fe24Co56 (TFC) with volume magnetostriction (VM) is demonstrated, and the actuation performances are evaluated. A 2 mm-diameter circular polyimide diaphragm coated with thin TFC/non-magnetic metal (NM) films is prepared as the micromechanical structure, and Pt, Cu, and W are used as the NM film. When an AC charge current flows through the TFC/NM film on the diaphragm under… Show more
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