&lt;title&gt;Micromachined VO&lt;formula&gt;&lt;inf&gt;&lt;roman&gt;2&lt;/roman&gt;&lt;/inf&gt;&lt;/formula&gt;-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics&lt;/title&gt;

Jerominek, Hubert; Renaud, Martin; Swart, Nicholas; Picard, Francis; Pope, Timothy D.; Levesque, Marc; Lehoux, Mario; Bilodeau, Ghislain; Pelletier, M.; Audet, Danick; Lambert, Philippe

doi:10.1117/12.250694

Cited by 19 publications

(11 citation statements)

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“…To improve the sensitivity performance, there are efforts to implement microbolometers using various materials, such as vanadium oxide (VO x ) [5][6][7] , amorphous silicon (a-Si) [8][9][10] , polycrystalline silicon-germanium (poly SiGe) 11,12 , yttrium barium copper oxide (YBaCuO) 13,14 , and metal films 15,26 . A high performance, very close to those of cooled infrared detectors, has been demonstrated with this approach, resulting in focal plane array (FPA) sizes as large as 640 × 480 and pixel sizes ranging from 50 µm down to 17 µm, especially using VOx and a-Si at much lower cost [5][6][7][8][9][10] . Another approach for highly sensitive micorbolometer is the use of silicon p-n junction diodes as the temperature sensitive element instead of resistive microbolometers in the detector arrays [27][28][29] .…”

Section: International Scenario and Recent Developmentsmentioning

confidence: 99%

“…The compatibility of the detectors with CMOS technology, to achieve this integration, is one of the main concerns for the development of lowcost detectors. Implementation of microbolometers on surface micromachined, bridges on CMOS-processed wafers is one of the most common approaches for uncooled IR imaging [5][6][7][8][9][10][11][12] . The bolometers are fabricated on these thermallyisolated and suspended bridges, as shown in Fig.…”

Section: International Scenario and Recent Developmentsmentioning

confidence: 99%

See 1 more Smart Citation

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Bhan¹,

Saxena²,

Jalwania³

et al. 2009

DSJ

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Recently, a lot of attention has been paid to infrared imaging using uncooled microbolometer detectors, primarily because of their low cost, and wide military and civilian applications. This paper reviews the basic principles of these detectors and some of the important works done internationally in this field. This paper presents some of the research work on titanium microbolometer carried out at Solid State Physics Laboratory, Delhi.

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Section: International Scenario and Recent Developmentsmentioning

confidence: 99%

Section: International Scenario and Recent Developmentsmentioning

confidence: 99%

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Bhan¹,

Saxena²,

Jalwania³

et al. 2009

DSJ

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show abstract

“…2 [7,8]. The microbolometer consists of a 0.5 μm thick micro-bridge of Si 3 N 4 suspended above the underlying silicon substrate, two narrow legs of Si 3 N 4 which are 2.5 μm high and supporting the bridge, and a 50×50 μm thin film (500 Å) of VO 2 which is encapsulated in the center of the micro-bridge.…”

Section: The Imperfection Of Conventional Bias Methodsmentioning

confidence: 99%

A New Bias Method for Microbolometer Array

Chen

2009

J Infrared Milli Terahz Waves

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In this paper, we describe the effect on the performance of focal plane arrays (FPAs) acted by the non-uniformity of microbolometer array resistance under conventional bias methods, put forward a new bias method for the first time, which provides a unique bias to each of microbolometer array detector elements and can be called constant power bias method, deduce the theoretically algorithmic base of this bias method, and verify its advantages. Theoretical analysis and experimentally measuring results indicate that the bias method can effectively improve the performance of microbolometric FPAs.

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“…In order to improve the sensitivity of microbolometer, a standard micro-bridge structure which is widely utilized in microbolometric focal plane arrays is used for microbolometer pixel [6,7]. The micro-bridge structure of VO x bolometer is illustrated in Fig.…”

Section: Fabrication Of Linear Microbolometric Arraymentioning

confidence: 99%

Linear Microbolometric Array Based on VOx Thin Film

Chen

2010

J Infrared Milli Terahz Waves

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In this paper, a linear microbolometric array based on VO x thin film is proposed. The linear microbolometric array is fabricated by using micromachining technology, and its thermo-sensitive VO x thin film has excellent infrared response spectrum and TCR characteristics. Integrated with CMOS circuit, an experimentally prototypical monolithic linear microbolometric array is designed and fabricated. The testing results of the experimental linear array show that the responsivity of linear array can approach 18KV/W and is potential for infrared image systems.

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<title>Micromachined VO<formula><inf><roman>2</roman></inf></formula>-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics</title>

Cited by 19 publications

References 0 publications

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

A New Bias Method for Microbolometer Array

Linear Microbolometric Array Based on VOx Thin Film

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