1995
DOI: 10.1117/12.221403
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<title>Integrated optoelectronic waveguide detectors in SiGe for optical communications</title>

Abstract: The monolithic integration of a SiGe-optical waveguide with a detector based on SiGeabsorbing layers is presented. A maximum internal quantum efficiency of i = 40 % has been measured at A = 1.3 jzm, which corresponds to an external efficiency of i = ii .Thi s device is suitable for 2.5 GBit/s data transmission, the performance is limited by the RC time constant due to a capacitance of C = 1.7 pF.

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Cited by 7 publications
(7 citation statements)
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References 17 publications
(21 reference statements)
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“…In 1994, Splett et al [125] [35] reported another version of the p-i-n SiGe MQW detector (figure 17) this time integrated with a single mode rib waveguide. They achieved an external quantum efficiency of up to 12% at λ 0 =1.282 µm.…”
Section: Detectorsmentioning
confidence: 99%
See 1 more Smart Citation
“…In 1994, Splett et al [125] [35] reported another version of the p-i-n SiGe MQW detector (figure 17) this time integrated with a single mode rib waveguide. They achieved an external quantum efficiency of up to 12% at λ 0 =1.282 µm.…”
Section: Detectorsmentioning
confidence: 99%
“…Optical and electronic integration has taken place only in a very simple way (e.g. [33], [34], [35]), and remains a challenge. However, recent initiatives such as the DARPA EPIC programme [36] will also begin to address these issues.…”
Section: Monolithic Integrated Devicesmentioning
confidence: 99%
“…Light detection is another major research topic in silicon photonics. Strained germanium and silicon germanium push the absorption out to 1.55 μm wavelength and are attractive since it is compatible with CMOS processing capabilities [12,13]. Integration of the photodetector with the receiver is critical for lower capacitance and higher sensitivity [14].…”
Section: Introductionmentioning
confidence: 99%
“…Various Ge waveguide photodetectors (WPD) have been demonstrated using epitaxial growth on silicon photonics platform with high quantum efficiencies [1,2] and have been integrated with CMOS electronics operating at 10 Gb/s [3]. Also, SiGe or engineered Si WPDs are being investigated to overcome the lattice mismatch of Ge photodetectors [4,5]. On III-V substrates pre-amplified photoreceivers have been demonstrated incorporating optical amplifiers with photodetectors for increased receiver sensitivity [6].…”
Section: Introductionmentioning
confidence: 99%