<title>Holographic interferometric microscope optimized by conjugate reconstruction</title>

Abstract

A holographic interferometric microscope is presented, which performs a comfortable combination of the measurement accuracy of holographic interferometry and the imaging performance of a microscope objective. Conjugate reconstruction is used to separate the holographic recording setup and the microscopic observation arrangement Furthermore an ideal optimized interferometer geometry can be achieved by conjugate reconstruction. Experimental results of investigations ofmicroelectronic elements will be demonstrated.