1997
DOI: 10.1117/12.270014
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<title>Excimer micromachining for texturing silicon solar cells</title>

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“…The use of a laser beam allows direct writing of the texture patterns, use of masks (Ortabasi et al, 1997), or diffractive optics (Huang et al, 2010) to generate patterns on the surface. Direct writing with the laser beam is the most flexible among the listed, since the same optical chain can be manipulated to work on different materials and patterns.…”
Section: Introductionmentioning
confidence: 99%
“…The use of a laser beam allows direct writing of the texture patterns, use of masks (Ortabasi et al, 1997), or diffractive optics (Huang et al, 2010) to generate patterns on the surface. Direct writing with the laser beam is the most flexible among the listed, since the same optical chain can be manipulated to work on different materials and patterns.…”
Section: Introductionmentioning
confidence: 99%