“…This rapid development has included implementation of novel waveguide schemes [3,7], continuous improvements in active region designs [2][3][4][5][6][7][8][9][10], and device realization in the mature GaAs/AlGaAs material system, with material grown by established technologies such as molecular beam epitaxy (MBE). The growth of THz QCLs does, however, remain extremely challenging, owing to the stringent demands for precise control of individual layer thicknesses and alloy compositions, which must be maintained over the, typically, 10 µm thick active regions.…”