2015
DOI: 10.1364/oe.23.002720
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The MBE growth and optimization of high performance terahertz frequency quantum cascade lasers

Abstract: Abstract:The technique of molecular beam epitaxy has recently been used to demonstrate the growth of terahertz frequency GaAs/AlGaAs quantum cascade lasers (QCL) with Watt-level optical output powers. In this paper, we discuss the critical importance of achieving accurate layer thicknesses and alloy compositions during growth, and demonstrate that precise growth control as well as run-to-run growth reproducibility is possible. We also discuss the importance of minimizing background doping level in maximizing Q… Show more

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Cited by 42 publications
(23 citation statements)
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“…Further, it seems that there exits an obvious change for the scaling factor dP CW /dL. For the devices with L≤2.9 mm, the P CW is nearly linear with L as observed in some previous reports 7,12 and dP CW /dL is ∼83 mW/mm. When L is longer than 2.9 mm, dP CW /dL is ∼-28 mW/mm.…”
supporting
confidence: 75%
See 1 more Smart Citation
“…Further, it seems that there exits an obvious change for the scaling factor dP CW /dL. For the devices with L≤2.9 mm, the P CW is nearly linear with L as observed in some previous reports 7,12 and dP CW /dL is ∼83 mW/mm. When L is longer than 2.9 mm, dP CW /dL is ∼-28 mW/mm.…”
supporting
confidence: 75%
“…Since the first demonstration in 2002, 3 THz QCLs have witnessed a rapid development. Till date, the frequency ranges from 1.2 to 5.0 THz 4,5 and the highest output power in pulsed wave (PW) mode achieves more than 1 W. 6,7 However, the output power in continuous wave (CW) mode is still limited to 138 mW since 2006. 8 This is an impediment toward many important applications in spectroscopy, imaging, remote sensing, etc.…”
mentioning
confidence: 99%
“…In addition, the THz radiation is strongly diffracted from what is essentially a sub-wavelength slit at the facet, which makes it difficult to collect and collimate the THz beam [5]. While the highest THz QCL temperature performances have been achieved in MM QCL waveguides, the highest emitted THz QCL powers [6][7][8] have been recorded with surface plasmon waveguides where a significant portion of the laser field resides outside the active region. The increased spatial extent of the surface plasmon mode leads to an improvement of both the out-coupling performance and the beam diffraction at the expense of a reduction in the confinement factor of the mode in the active region.…”
Section: Introductionmentioning
confidence: 99%
“…Variants of this design emitting at higher frequencies have set several THz QCL power records when processed into surface plasmon waveguides [7,8]. In this study THz QCLs are processed as MM waveguides with a 13-µm-thick active region, 95-µmridge width, and a length of 1.58 mm.…”
Section: Introductionmentioning
confidence: 99%
“…A p-GaAs/Al x Ga 1Àx As heterojunction IR detector was grown on a semi-insulating GaAs substrate by molecular beam epitaxy 19 ( Fig. 1(a)).…”
mentioning
confidence: 99%