2014
DOI: 10.1039/c4tc00849a
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Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure

Abstract: Graphene has attracted a great deal of research interest owing to its unique properties and many potential applications. Chemical vapor deposition has shown some potential for the growth of large-scale and uniform graphene films; however, a high temperature (over 800 C) is usually required for such growth. A whole new method for the synthesis of graphene at low temperatures by means of remote plasmaenhanced atomic layer deposition is developed in this work. Liquid benzene was used as a carbon source. Large gra… Show more

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Cited by 44 publications
(27 citation statements)
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References 35 publications
(48 reference statements)
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“…For this set of samples, the 2D peak has a symmetrical shape and can be fitted with a single Lorentzian and there is no notable peak shift. The full‐width half maxima (FWHM) of 2D band varies within 45–53 cm −1 , indicating the typical features of single to few layers of graphene …”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…For this set of samples, the 2D peak has a symmetrical shape and can be fitted with a single Lorentzian and there is no notable peak shift. The full‐width half maxima (FWHM) of 2D band varies within 45–53 cm −1 , indicating the typical features of single to few layers of graphene …”
Section: Resultsmentioning
confidence: 99%
“…Two specific bands namely G (≈1580 cm −1 ) and 2D (≈2700 cm −1 ) show the characteristic features of graphene in a typical Raman spectra . Intensity ratio of the 2D band to the G band, I 2D /I G , is believed to correlate with the structural and electronic properties of a given type of graphene . Herein, we report the significant enhancement of photocatalytic activity and substantial bandgap narrowing of EG/SiC composites, where the high‐quality EG was grown in controlled manner using high‐temperature graphitization of SiC.…”
Section: Introductionmentioning
confidence: 89%
“…TEM imaging of the graphene flakes reveals the expected characteristic hexagonal lattice pattern ( Figure 9). The selected area electron diffraction (SAED) pattern clearly shows a single crystal graphene hexagonal lattice diffraction with a preferred ( 010 1 ) plane orientation [43]. Table 1 summarises the graphene growth that is observed for chlorobenzene in a PMMA matrix.…”
Section: A C C E P T E D Accepted Manuscriptmentioning
confidence: 97%
“…52,[61][62][63][64][65][66][67][68] Benzene, a ring structured molecule, is similar to the basic unit of graphene, which just needs to dehydrogenate and connect to each other to form the monolayer graphene. benzene, alcohols, alkane, DMF etc.…”
Section: Growth With Liquid Carbon Sourcesmentioning
confidence: 99%