Low Temperature Irreversible Poly(DiMethyl) Siloxane Packaging of Silanized SU8 Microchannels: Characterization and Lab-on-Chip Application

Abstract

In this paper, we describe and characterize a novel method, based on silanization, for strong bonding of SU8 microchannels to poly(dimethyl)siloxane (PDMS) flexible covers. First, the SU8 surface treatment process (silanization) is characterized through atomic force microscopy and contact angle measurements. The aging study proves grafting stability during more than two days. Silanized SU8 patterns and PDMS cover are finally bonded to seal the microchannel network. Such assembled microdevices can be used without leakage at flow rates above 2.4 mL/min, corresponding to 1.2 MPa if the PDMS deformation is neglected. The bonding tensile pressure exceeds 1.5 MPa, proving the packaging strength. Furthermore, SU8-PDMS composite devices display stable bonding after several weeks of storage. This rapid low cost and low temperature bonding technique is finally successfully employed to fabricate a fully packaged biochip for electric and fluidic handling of biological cells.[2014-0116]

Growing Patterned, Cross-linked Nanoscale Polymer Films from Organic and Inorganic Surfaces Using Ring-Opening Metathesis Polymerization

“…In addition, SU-8 is optically transparent in the visible spectrum and so is suitable for optical applications . Although SU-8 has a high degree of biocompatibility, chemical modification of the SU-8 surface is of interest to improve adhesion of molecules to SU-8, of the SU-8 itself to other materials, , and to modify the surface of the SU-8 material to increase surface wetting or enable targeted interaction between cells and molecules of interest in microfluidic and bioMEMS applications. , Modification of SU-8 is typically done through the reaction of unreacted epoxy groups available on the SU-8 surface; however, these are typically consumed during the postexposure bake (PEB) and the hard-bake in postprocessing. We investigated the modification of cured SU-8 to grow ssCAP ROMP films from a modified SU-8 surface as a demonstration of the aforementioned protocol to be used with bioMEMS and microfluidics, exporting the advantages of surface modification through CAP to relevant applications.…”

Surface Functionalization of SU-8 Vertical Waveguide for Biomedical Sensing: Bacteria Diagnosis

“…Step 1: Plasma treatment The SU-8 surface is activated by oxygen plasma for 5 min at a pressure of 200 mTorr and a power of 30 W [4,12]. Through plasma treatment, the epoxy group is opened and -OH groups are created on the SU-8 surface.…”

Thin-film conformal fluorescent SU8-phenylenediamine

“…1 Since epoxy groups are crosslinked by being exposed to ultraviolet (UV) light (typically 365–405 nm) and form a stable solid structure, the polymer belongs to the family of negative photoresists. 2,3 After revealing numerous advantages of SU8, it became a technological platform across many disciplines, including microfluidics, 4–7 micromechanics, 8 biomedicine, 9 optoelectronics, 10,11 and many others. 12–15…”

“…1 Since epoxy groups are crosslinked by being exposed to ultraviolet (UV) light (typically 365-405 nm) and form a stable solid structure, the polymer belongs to the family of negative photoresists. 2,3 After revealing numerous advantages of SU8, it became a technological platform across many disciplines, including microfluidics, [4][5][6][7] micromechanics, 8 biomedicine, 9 optoelectronics, 10,11 and many others. [12][13][14][15] Superior mechanical and thermal stability along with great adhesion to a vast majority of commonly used surfaces (e.g., glasses, 7 metals, 16 semiconductors, 17 and many others 18 ) make SU8 a platform of choice in cases where facile low-cost fabrication of microstructures is required.…”