Low temperature internal friction in nanocrystalline diamond films

Metcalf, Thomas; Liu, Xiao; Houston, Brian H.; Baldwin, Jeffrey W.; Butler, James E.; Feygelson, Tatyana I.

doi:10.1063/1.1868065

Cited by 19 publications

(14 citation statements)

References 12 publications

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“…The internal friction of the nanocrystalline diamond film is attributed to a highly disordered interfacial layer between the film and silicon substrate, where the internal friction could be even higher than in its amorphous counterpart. 32 Thus, for most of the thickness above the interfacial layer, we could infer that the internal friction may indeed be much smaller.…”

Section: Resultsmentioning

confidence: 95%

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Microstructure dependence of low-temperature elastic properties in amorphous diamondlike carbon films

et al. 2005

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We have studied the internal friction and the relative change in the speed of sound of amorphous diamondlike carbon films prepared by pulsed-laser deposition from 0.3 K to room temperature. Like most amorphous solids, the internal friction below 10 K exhibits a temperature independent plateau. The values of the internal friction plateaus, however, are slightly below the universal glassy range where the internal frictions of almost all amorphous solids lie. Similar observations have been made in our earlier studies in the thin films of amorphous silicon and amorphous germanium, and the behavior could be well accounted for by the existence of the low-energy atomic tunneling states. In this work, we have varied the concentration of sp 3 vs sp 2 carbon atoms by increasing the laser fluence from 1.5 to 30 J / cm 2 . Our results show that both the internal friction and the speed of sound have a nonmonotonic dependence on an sp 3 / sp 2 ratio with the values of the internal friction plateaus varying between 6 ϫ 10 −5 and 1.1ϫ 10 −4 . We explain our findings as a result of a possible competition between the increase of atomic bonding and the increase of internal strain in the films, both of which are important in determining the tunneling states in amorphous solids. In contrast, no significant dependence of laser fluence is found in shear moduli of the films, which vary between 220 and 254 GPa. The temperature dependence of the relative change in speed of sound, although it shows a similar nonmonotonic dependence on laser fluence as the internal friction differs from those found in thin films of amorphous silicon and amorphous germanium, which we explain as having the same origin as the anomalous behavior recently observed in the speed of sound of thin nanocrystalline diamond films.

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Section: Resultsmentioning

confidence: 95%

“…2, together with a DPO carrying a nanocrystalline diamond film deposited by chemical vapor deposition. 32 The solid line labeled "background" is the internal friction of a bare DPO, Q sub −1 , used in Eq. ͑2͒.…”

Section: Resultsmentioning

confidence: 99%

Microstructure dependence of low-temperature elastic properties in amorphous diamondlike carbon films

et al. 2005

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“…45 Dissipation in ta-C indicated the processes dominated by two-level tunneling states ͑TLS͒. 11 Recent investigation 36 of the quality factor of metalcoated UNCD fixed-fixed beams at extremely low temperatures ͑Ͻ10 K͒ indicated the presence of TLS processes. Table II summarizes the results reported by other groups [9][10][11]24,44,45 as compared to ours for different flexural beams fabricated using NCD, UNCD, or ta-C films.…”

Section: Dissipation In Diamondmentioning

confidence: 99%

“…Measurements on these traditional UNCD were performed using nanoindentation ͑864 GPa͒ 5 and cantilever beam deflection ͑916-959 GPa͒. 4 However, MPCVD-grown NCD fixed-fixed resonator structures yielded Young's modulus values ranging from 680-980 GPa, [9][10][11] and MPCVD-grown UNCD fixed-fixed resonators grown at 550°C yielded a modulus of 710 GPa. 2 The reasons for the somewhat lower Young's modulus of the UNCD films studied here compared to MPCVD grown traditional UNCD films discussed are not understood at this time.…”

Section: A Young's Modulusmentioning

confidence: 99%

“…[7][8][9][10][11] This is due to their superior physical properties such as a high Young's modulus, their stable and inert surface with low adhesion to other materials, and their good tribological performance. [12][13][14] High-frequency devices based on MEMS or NEMS structures have a large surface to volume ratio and can have high dissipation if surface effects dominate the loss mechanisms.…”

Section: Introductionmentioning

confidence: 99%

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Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

et al. 2009

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We have characterized mechanical properties of ultrananocrystalline diamond UNCD thin films grown using the hot filament chemical vapor deposition HFCVD technique at 680 °C, significantly lower than the conventional growth temperature of 800 °C. The films have 4.3% sp2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, 1 m thick, exhibit a net residual compressive stress of 3701 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 8382 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum UHV conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 79030 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.0570.038. The quality factors Q of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD resonators. We have characterized mechanical properties of ultrananocrystalline diamond ͑UNCD͒ thin films grown using the hot filament chemical vapor deposition ͑HFCVD͒ technique at 680°C, significantly lower than the conventional growth temperature of ϳ800°C. The films have ϳ4.3% sp 2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, ϳ1 m thick, exhibit a net residual compressive stress of 370Ϯ 1 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 838Ϯ 2 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum ͑UHV͒ conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 790Ϯ 30 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.057Ϯ 0.038. The quality factors ͑Q͒ of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD re...

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The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

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The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

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Low temperature internal friction in nanocrystalline diamond films

Cited by 19 publications

References 12 publications

Microstructure dependence of low-temperature elastic properties in amorphous diamondlike carbon films

Microstructure dependence of low-temperature elastic properties in amorphous diamondlike carbon films

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

The CVD of Nanodiamond Materials

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