Low-power MOEMS components for active optical systems

Castracane, James; Yan, Dong; Madison, Seth; Bai, Xu

doi:10.1117/12.524917

Cited by 2 publications

(3 citation statements)

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“…Upon actuation, every other ruling is pulled down a quarter of a selected wavelength. This creates a diffraction pattern in which the original orders are extinguished and additional orders arise, named 'half' orders [6].…”

Section: Theory Of Diffractive Memsmentioning

confidence: 99%

“…The process would allow for in-house fabrication for a higher control of layer thickness and other process parameters. The first generation of devices, reported by Castracane et al [6], show initial actuation voltage reduction of 8 V compared to their polysilicon counterparts which were switching at 24 V. The current polyimide device being optimized is based on the polysilicon 'doubleclamped' design.…”

Section: Polyimide Mems Fabrication and Optimizationmentioning

confidence: 99%

“…The fill factor is ½ when the grating period is twice the ruling width. The third term is obtained by integrating the diffraction pattern, as given in equation (6), between both minima at each side of the diffracted order. Given a wavelength of 1550 nm, the normalized diffracted power for orders 0 and 1 are 44.6% and 19.6%.…”

Section: Theory Of Diffractive Memsmentioning

confidence: 99%

See 2 more Smart Citations

Optimization of diffractive MEMS for optical switching

Verheggen

Khan-Raja

Castracane

2007

Journal of Experimental Nanoscience

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Diffractive Micro-Electro-Mechanical Systems (D-MEMS) have enjoyed increased attention in the fields of communication, spectroscopy, projection display, and maskless lithography. Redirecting an optical signal into predefined angles, precisely balancing this optical signal, inherent wavelength filtering capability and high switching speed are some of the advantages over other optical MEMS. D-MEMS based on customized IC fabrication processes are being used to assemble system-level architectures for integration into mainstream circuitry. The goal of this work is to improve the optical performance while minimizing the power consumption and operational voltage. Operational characteristics of new D-MEMS have achieved a reduction of the optical switching voltage to 2V at a 6.5V bias. Structural modifications through variation in ruling/top-electrode width and spacing have been studied. An alternative structural material, polyimide, is being optimized for further decreasing the operating voltage of the D-MEMS devices.

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Section: Theory Of Diffractive Memsmentioning

confidence: 99%

Section: Polyimide Mems Fabrication and Optimizationmentioning

confidence: 99%