Optical ADD/DROP multiplexers (OADM) are incorporated into all-optical network structures that provide fixed access to a subset of the wavelengths in Wavelength Division Multiplexer (WDM) systems. The rapid growth of broadband data communications and the drive toward cost reduction have made optical MEMS (MicroElectro-Mechanical Systems) an extremely attractive technology for applications in optical communications. This paper will present theoretical analysis, simulation and testing results of an ADD/DROP multiplexer based on the MEMS-based micro-actuators. The micro-actuator is a MEMS-based compound grating (MCG) with a reconfigurable surface that couples the mechanical motion with optical diffraction. The diffraction patterns depend on the wavelength, incident angle and the grating structural parameters. This property is used to design an OADM that can be applied to broad areas in optical communication. A theoretical analysis is presented to establish the relationship between diffraction beams and the structural parameters of the grating, the wavelength of incident light, incident angle. Prototypes of these micro-actuators have been fabricated. The initial testing demonstrated the feasibility of using the MCG as an OADM. New designs of the MCG for application to the 1 .55um optical telecommunication standard will be discussed.
Despite the recent sag in the optical telecom sector, the development and application of Micro-Opto-Electro-Mechanical Systems (MOEMS)-based devices for optical interconnects continues to expand. The utility of such fundamental research is finding increasing relevance in a variety of technical and commercial areas. This paper will report on the present status of the diffractive and reflective components and arrays that are being developed at the University at Albany's Institute for Materials (UAIM) NanoFab 200. Selected examples include the current generation of the patented MEMS Compound Grating (MCG) and an innovative micro-scanner device, both of which are being examined for inclusion in prototype interconnect systems.These devices are based on a dual technology development path which includes decreasing feature size and increasing integration level. The MCG prototypes are currently produced with 1-2 micron feature size in 144 element arrays. The surface topology of these components can be controlled using electrostatic attraction to yield both angular deflection and wavelength separation. The optical and mechanical performance of these devices that use either polysilicon or silicon dioxide as a structural material will be reported. Several prototype MCG array architectures have been interfaced with optical sources including VCSEL arrays to test optical interconnect concepts. In addition, recent work on an innovative micro-scanner will be discussed. The micro-scanner is based on a cantilever design with access electrodes to electrostatically control deflection in multiple planes. Details of the components including simulation, fabrication and initial prototype performance tests will be presented.
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