Abstract:This paper reports the development of a low-power electrostatic microthruster based-on Helmholtz resonance. This fluidic resonance phenomenon is utilized to create high-speed jets of air for thrust generation. The microthruster contains a curved-electrode (~8.8 µm deep) and provides high force to, and large deflection of a vibrating membrane thus resulting in twice higher thrust performance than previously reported devices with a flat-electrode design. The out-of-plane curved electrode is formed on a silicon w… Show more
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