High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance

Aktakka, Ethem Erkan; Peterson, Robert A.; Najafi, K.

doi:10.1109/jmems.2013.2279079

Cited by 13 publications

(2 citation statements)

References 66 publications

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“…Different functional materials in the structure and physical properties can give rise to broad applications for micro-actuators, and can solve certain difficult technical problems associated with integrated and intellectualized structures [4]. Therefore, a good functional material is expected to hold a promising prospect in the fields of micro-machining, biomedicine, robotics, aeronautics and astronautics [5,6,7], etc.…”

Section: Introductionmentioning

confidence: 99%

Frequency Invariability of (Pb,La)(Zr,Ti)O3 Antiferroelectric Thick-Film Micro-Cantilevers

Jin

Xiao

et al. 2018

Sensors

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Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb0.97La0.02)(Zr0.95Ti0.05)O3 (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.

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Section: Introductionmentioning

confidence: 99%

Frequency Invariability of (Pb,La)(Zr,Ti)O3 Antiferroelectric Thick-Film Micro-Cantilevers

Jin

Xiao

et al. 2018

Sensors

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“…Micro-Electro-Mechanical Systems (MEMS) have received extensive interest in the past two decades [ 1 , 2 ]. Due to their great advantages such as small size or mass, low cost of production, low power consumption, and easy integration into other systems, they are commonly used in numerous engineering devices, e.g., micro-actuators [ 3 ], micro-switches [ 4 ], atomic force microscopes [ 5 ], and micro-resonators [ 6 ]. Numerous analytical, numerical and experimental studies have been performed by researchers on the static and dynamic behaviors of such systems.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Robust Adaptive Multi-Modal Vibration Control of Bi-Electrode Micro-Switch with Constraints on the Input

et al. 2017

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Micro functionally graded material (FGM) structures are able to have proper functions in vast environments. In this paper, nonlinear governing equations of the size-dependent micro-switch are derived using modified couple stress theory. Effective external forces including fringing field of electrostatic force and Casimir force are considered. Two electrodes cooperate to track the in-plane motions of the micro continuous system by tuning the supply voltages of the electrostatic force. An adaptive projection law is proposed to compensate for the effect of error in the initial estimates of system parameters. To achieve more reliability, a robust active vibration strategy is presented to withstand external disturbances. At any time, just one electrode is operational, and optimization is performed to decrease the controller gains. The highly nonlinear inputs have a singularity in the dynamics of the system, which are known as pull-in instability, so for safety, the controller gains are chosen such that the pull-in voltage is avoided. The dynamic response of the system is simulated using a single mode or multiple modes to validate the effectiveness of the presented vibration control approaches. The effects of error of the initial estimate of system parameters, the effect of impulse and the influences of various volume fractions are studied.

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Energy Harvesting

Daukševičius

Briand

2017

Material‐Integrated Intelligent Systems ‐ Technology and Applications

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High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance

Cited by 13 publications

References 66 publications

Frequency Invariability of (Pb,La)(Zr,Ti)O3 Antiferroelectric Thick-Film Micro-Cantilevers

Frequency Invariability of (Pb,La)(Zr,Ti)O3 Antiferroelectric Thick-Film Micro-Cantilevers

Nonlinear Robust Adaptive Multi-Modal Vibration Control of Bi-Electrode Micro-Switch with Constraints on the Input

Energy Harvesting

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