2017
DOI: 10.3390/mi8090263
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Nonlinear Robust Adaptive Multi-Modal Vibration Control of Bi-Electrode Micro-Switch with Constraints on the Input

Abstract: Micro functionally graded material (FGM) structures are able to have proper functions in vast environments. In this paper, nonlinear governing equations of the size-dependent micro-switch are derived using modified couple stress theory. Effective external forces including fringing field of electrostatic force and Casimir force are considered. Two electrodes cooperate to track the in-plane motions of the micro continuous system by tuning the supply voltages of the electrostatic force. An adaptive projection law… Show more

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Cited by 6 publications
(4 citation statements)
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“…where 0 = 8.85 × 10 −12 Fm −1 is the permittivity of free space and w the lateral displacement of each point on the physical neutral plane. The Casimir force per unit length is also obtained as [41,42]:…”
Section: Micro-resonator On a Fixed Foundation (First Model)mentioning
confidence: 99%
“…where 0 = 8.85 × 10 −12 Fm −1 is the permittivity of free space and w the lateral displacement of each point on the physical neutral plane. The Casimir force per unit length is also obtained as [41,42]:…”
Section: Micro-resonator On a Fixed Foundation (First Model)mentioning
confidence: 99%
“…Over the past years, a number of robust and adaptive control techniques have been proposed for uncertain nonlinear systems [1][2][3][4][5][6][7]. Sliding mode control (SMC), due to its robustness against parameter variations and simplicity for handling nonlinear systems with bounded external disturbances, has received much attention [8,9].…”
Section: Introductionmentioning
confidence: 99%
“…Attracted by the above observations, the utilization of closed loop control strategies to reduce and even compensate the effects of uncertainties and disturbances for the characterization of MEM devices have shown to be successful in increasing their efficiency [27][28][29][30][31][32][33]. Moreover, considering the importance of micro-tunable capacitors, several works [27][28][29][30][31] proposed numerous closed-loop control strategies to improve their efficiency and possibly increase their tunability and tuning ratio.…”
Section: Introductionmentioning
confidence: 99%