Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor

Ren, Mingyuan; Xu, Honghai; Han, Xiaoxu; Dong, Changchun; Lu, Xuebin

doi:10.3390/s20041238

Cited by 6 publications

(1 citation statement)

References 23 publications

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“…Generally, MEMS/MOEMS gyroscopes can be divided into electrostatic driving [17], piezoelectric driving [18], and electromagnetic driving [19], in terms of the driving methods; and can be divided into capacitance sensing [20], current sensing [21], resistance sensing [22], frequency sensing [9], and tunnel effect sensing [23], in terms of the sensing methods; and also can be divided into vibration type [24] and rotor type [25], from the structure difference. The vibration-type silicon micro-gyroscope can also be further divided into linear vibration [26] and angular vibration [27].…”

Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

View full text Add to dashboard Cite

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Electrified lab on disc systems: A comprehensive review on electrokinetic applications

Kordzadeh-Kermani

Madadelahi

Ashrafizadeh

et al. 2022

Biosensors and Bioelectronics

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4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

Liu,

Long,

Wehner

et al. 2024

Commun Eng

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Inertial navigation on a chip has long been constrained by the noise and stability issues of micromechanical Coriolis gyroscopes, as silicon, the dominant material for microelectromechanical system devices, has reached the physical limits of its material properties. To address these challenges, this study explores silicon carbide, specifically its monocrystalline 4H polytype, as a substrate to improve gyroscope performance due to its low phonon Akhiezer dissipation and its isotropic hexagonal crystal lattice. We report on low-noise electrostatic acoustic resonant gyroscopes with mechanical quality factors exceeding several millions, fabricated on bonded 4H silicon carbide-on-insulator wafers. These gyroscopes operate using megahertz frequency bulk acoustic wave modes for large open-loop bandwidth and are tuned electrostatically using capacitive transducers created by wafer-level deep reactive ion etching. Experimental results show these gyroscopes achieve superior performance under various conditions and demonstrate higher quality factors at increased temperatures, enabling enhanced performance in an ovenized or high-temperature stabilized configuration.

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Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor

Cited by 6 publications

References 23 publications

MEMS and MOEMS Gyroscopes: A Review

MEMS and MOEMS Gyroscopes: A Review

Electrified lab on disc systems: A comprehensive review on electrokinetic applications

4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

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