4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation
Zhenming Liu,
Yaoyao Long,
Charlotte Wehner
et al.
Abstract:Inertial navigation on a chip has long been constrained by the noise and stability issues of micromechanical Coriolis gyroscopes, as silicon, the dominant material for microelectromechanical system devices, has reached the physical limits of its material properties. To address these challenges, this study explores silicon carbide, specifically its monocrystalline 4H polytype, as a substrate to improve gyroscope performance due to its low phonon Akhiezer dissipation and its isotropic hexagonal crystal lattice. … Show more
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