MEMS and MOEMS Gyroscopes: A Review

Abstract

Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

Analysis of post-processing methods of IMU MEMS cluster of autonomous navigation of ground transport systems

“…The operation of modern automated systems is impossible without the use of body position sensors in inertial space. Among the huge variety of inertial sensors, microelectromechanical systems (MEMS) have been increasingly distinguished in recent years [1]. MEMS sensors are inertial information sensors that combine a mechanical component (sensitive elements of gyroscopes and accelerometers) and electronics [2].…”