“…Ultraviolet (UV) photodiodes based on wide bandgap semiconductors have been attracting a great deal of attention for commercial and military applications in chemical sensing, flame detection, ozone-hole sensing, short-range communication, and missile plume sensing due to their superior physical properties [1,2]. Recently, a great deal of research has been carried out to develop highperformance 4H-SiC UV photodiodes with varieties of device structures, such as Schottky [3,4], metal-semiconductor-metal [5,6], p-n junction [7], p-i-n junction [8], and avalanche photodiodes [9].…”