Love mode surface acoustic wave ultraviolet sensor using ZnO films deposited on 36° Y-cut LiTaO3

Pang, Hua-Feng; Fu, Yong Qing; Li, Zhijie; Li, Yifan; Ma, Jianguo; Placido, Frank; Walton, A.J.; Zu, Xiaotao

doi:10.1016/j.sna.2013.01.016

Cited by 47 publications

(30 citation statements)

References 49 publications

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“…where the natural number, n, corresponds to different resonant modes [261]. This relation clearly shows a thickness effect for FBARs, e.g., the thinner ZnO film results in a higher resonant frequency.…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 81%

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Peng¹,

Luo²,

Fu³

2018

Functional Materials and Electronics

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Progress in ZnO thin films and nanostructures for the acoustic wave microfluidic and sensing applications are reviewed in this chapter. ZnO thin films with good piezoelectric properties possess large electromechanical coupling coefficients and can be fabricated for the surface acoustic wave (SAW) and film-bulk acoustic resonator (FBAR) devices with a good acoustic performance. The SAWs can be excited to mix, stream, pump, eject, and atomize the liquid, and precision sensing can be performed using SAWs and FBARs. Therefore, the ZnO SAW devices are attractive to be integrated into a labon-chip system where the SAWs can transport bio-fluids to the desired area, mix the extracted DNA or proteins, and detect the changes of the signals using SAWs or FBARs. The ZnO SAW and FBAR devices in combination with different sensing layers could also be used to successfully detect gas, UV light, and biochemicals with remarkable sensitivities. 5.1 INTRODUCTION Zinc oxide (ZnO) is a binary compound via a covalent bonding between the transition-metal zinc atom and oxygen atom. ZnO thin films and nanostructures are multifunctional materials, which have attracted much attention from as early as 1930s until today due to various fundamental electronic, years, the development of new growth technologies of ZnO thin films and nanostructures and their new applications has renewed lots of interest on investigation of their growth mechanism, band structures, excitons, and deep centers in luminescence, nonlinear optics, and UV lasing [8,9]. With in-depth understanding of the semiconducting, optical, electronic, piezoelectric, and pyroelectric properties, ZnO has now been widely applied for microfluidics, These immense applications also have boosted the extensive researches on the fundamentals and growth techniques of the ZnO-based materials. typically at micron and submicron dimensions in a miniaturized system and the corresponding technologies for such systems. This multidisciplinary technology is comprehensively based on physics, nanotechnology, biotech-ZnO Thin Films and Nanostructures for Acoustic 197 the developments of the inkjet print-heads, DNA chips, and lab-on-a-chip is conveniently handled through generating, transporting, separating, consumption, high-throughput, compactness, high sensitivity, fast response, at microscale has been supported with the urgent needs from healthcare, medical research, life science, drug-development sectors. However, the and phenomena become dominant at a microscale level, such as capillary forces, surface roughness and undesired chemical interactions. These may be

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Section: Film Bulk Acoustic Resonatormentioning

confidence: 81%

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Peng¹,

Luo²,

Fu³

2018

Functional Materials and Electronics

Self Cite

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“…These parameters are largely related to the type and quality of the sensing and piezoelectric materials used and the type of sound wave used. In piezoelectric materials, higher mode acoustic waves [41][42][43][44][45][46] or higher values of the electromechanical coupling coefficient k eff 2 [32,39,47-50] are more likely to lead to higher photosensitivity (Eqs. (1), (2) and (3)).…”

Section: Signal-to-noise Ratio (Snr)mentioning

confidence: 99%

“…Because of this guided wave effect, Love mode devices can be designed to be the most sensitive of all known acoustic sensors [66]. Some UV detectors based on the Love wave have been reported [45,46,67].…”

Section: Love Modementioning

confidence: 99%

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Surface acoustic wave-based ultraviolet photodetectors: a review

et al. 2020

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“…[3][4][5][6][7][8] In recent years, photodetectors based on SAW devices have received extensive attention. [9][10][11] For example, Pang et al fabricated a LiTaO 3 -based Love mode SAW ultraviolet (UV) sensor with ZnO top layer, 12 which was operated at a resonant frequency of 41.5 MHz, with a frequency shi of 150 kHz under 254 nm UV radiation at 350 mW cm À2 Zhou et al used MoS 2 nanosheets as the UV-sensitive layer for SAW photodetectors, 8 which showed a maximum frequency shi of 3.5 MHz under a 365 nm UV illumination at a power density of 1.466 mW cm À2 . However, there are few reports about visible-light sensors or infrared sensors based on the SAW devices.…”

Section: Introductionmentioning

confidence: 99%

A high performance surface acoustic wave visible light sensor using novel materials: Bi₂S₃ nanobelts

Kan

Luo

et al. 2020

RSC Adv.

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Love mode surface acoustic wave ultraviolet sensor using ZnO films deposited on 36° Y-cut LiTaO3

Cited by 47 publications

References 49 publications

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Surface acoustic wave-based ultraviolet photodetectors: a review

A high performance surface acoustic wave visible light sensor using novel materials: Bi₂S₃ nanobelts

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Love mode surface acoustic wave ultraviolet sensor using ZnO films deposited on 36° Y-cut LiTaO3

Cited by 47 publications

References 49 publications

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Surface acoustic wave-based ultraviolet photodetectors: a review

A high performance surface acoustic wave visible light sensor using novel materials: Bi2S3 nanobelts

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Product

Resources

About

A high performance surface acoustic wave visible light sensor using novel materials: Bi₂S₃ nanobelts