1991
DOI: 10.1117/12.48764
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Long-wavelength Ge x Si 1-x /Si heterojunction infrared detectors and focal-plane arrays

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Cited by 23 publications
(7 citation statements)
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“…Since then, several different types of internal photoemission detectors have been demonstrated. [29,37,38] Among the initial detector developments, the most important types were metal-semiconductor Schottky barrier IR detectors, such as PtSi/Si detectors [39] operating in 3-5 μm range; Ge x Si 1−x /Si detectors [40,41] developed for 8-14 μm or even longer wavelengths. The absorber/photoemitter "electrode" is a metal or a metal silicide in the Schottky barrier and silicide detectors respectively.…”
Section: Free-carrier Based Infrared Detectorsmentioning
confidence: 99%
“…Since then, several different types of internal photoemission detectors have been demonstrated. [29,37,38] Among the initial detector developments, the most important types were metal-semiconductor Schottky barrier IR detectors, such as PtSi/Si detectors [39] operating in 3-5 μm range; Ge x Si 1−x /Si detectors [40,41] developed for 8-14 μm or even longer wavelengths. The absorber/photoemitter "electrode" is a metal or a metal silicide in the Schottky barrier and silicide detectors respectively.…”
Section: Free-carrier Based Infrared Detectorsmentioning
confidence: 99%
“…While some early attempts to develop SiGe IR detectors concentrated on potential LWIR applications [62,63], in this chapter we focus solely the development of devices for applications involving detection in the NIR band (up to ~1700 nm). The most straightforward method by which to adjust the cutoff wavelength of a SiGe photodetector in order to tune its range of response is to modify the Si 1-x Ge x alloy composition.…”
Section: Si 1-x Ge X Photodetector Design Parametersmentioning
confidence: 99%
“…Some of the earlier attempts in developing SiGe IR detectors focused on their LWIR applicationsby using internal photoemmision [52][53]. Renewed efforts are now developing these detectors for application in the NIR-SWIR band [54].…”
Section: Si 1-x Ge X (Sige) Detector Arraysmentioning
confidence: 99%