Long-term performance analysis of thermo-pneumatic micropump actuators

Schomburg, Werner Karl; Ahrens, Ralf; Bacher, W.; Engemann, S.; Krehl, P.; Martin, Julio San

doi:10.1109/sensor.1997.613660

Cited by 8 publications

(6 citation statements)

References 2 publications

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“…Furthermore, the estimated frequencies listed in Table II are also of the same order as the experimental values (∼20 Hz) quoted in the literature [10] for relevant scales and substrate materials. The achievable frequencies can be improved by either using high conductivity substrates or reducing the operating temperature range.…”

Section: Discussionsupporting

confidence: 68%

“…The actuation cycle consists of a volume expansion due to the pressure increase caused by electrothermal heating followed by contraction due to a pressure drop aided by ambient cooling. Earlier studies relevant to thermopneumatic actuation include: demonstration of thermopneumatically actuated microvalaves using silicon [8] and polydimethysiloxane (PDMS) [9] diaphragms for flow control in biochips used for integrated blood examination and the experimental characterization of the performance of polyimide diaphragm thermopneumatic actuators for micropumps with improved long term durability [10]. Unlike microelectrothermal actuators which are capable of delivering a large work per volume (∼10 4 −10 5 J/m 3 ), the work per volume delivered by thermopneumatic actuators is relatively low.…”

Section: Introductionmentioning

confidence: 99%

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Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators

Srinivasan

Spearing

2009

J. Microelectromech. Syst.

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This paper discusses a methodology to select materials which deliver the best performance for thermally actuated pneumatic and phase change microactuators. The material selection is based on performance metrics estimated using simple closed form solutions for classical linear elastic theory for axisymmetric plates/membranes and lumped heat capacity thermal models. Although the elastic moduli of the diaphragm materials dictate the volume expansion for a given temperature rise, their influence on the achievable pressure difference is much less. It is found that engineering polymers are most suitable for thermopneumatically actuated diaphragms for delivering large displacements and work for the achievable pressures at frequencies of a few hundreds of Hertz. The membrane stresses due to in-plane pre-tension are found to have an adverse effect on the actuator performance. The material issues which constrain the performance limits of phase change actuators are also assessed, and the promising characteristics of paraffin waxes for microsystem applications are discussed.[2008-0214]

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Section: Discussionsupporting

confidence: 68%

Section: Introductionmentioning

confidence: 99%

Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators

Srinivasan

Spearing

2009

J. Microelectromech. Syst.

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“…22,23 These techniques have harnessed a wide range of physical and chemical phenomena to induce flow in microchannels including: pneumatically induced deflection of membranes, [24][25][26][27][28][29][30][31] piezoelectricity, [32][33][34] electrostatic effects, [35][36][37][38][39][40][41] electrochemical reactions, [42][43][44][45][46] thermopneumatic [47][48][49] and acoustic [50][51][52][53][54][55] effects. 22,23 These techniques have harnessed a wide range of physical and chemical phenomena to induce flow in microchannels including: pneumatically induced deflection of membranes, [24][25][26][27][28][29][30][31] piezoelectricity, [32][33][34] electrostatic effects, …”

Section: Introductionmentioning

confidence: 99%

“…A large number of active on-chip pumping strategies have been suggested over the past decade. 22,23 These techniques have harnessed a wide range of physical and chemical phenomena to induce flow in microchannels including: pneumatically induced deflection of membranes, [24][25][26][27][28][29][30][31] piezoelectricity, [32][33][34] electrostatic effects, [35][36][37][38][39][40][41] electrochemical reactions, [42][43][44][45][46] thermopneumatic [47][48][49] and acoustic [50][51][52][53][54][55] effects. To date, the most widely used of these techniques are the pneumatic membrane pumps such as the peristaltic pump introduced by Quake's group.…”

Section: Introductionmentioning

confidence: 99%

Bubble pump: scalable strategy for in-plane liquid routing

Oskooei

Günther

2015

Lab Chip

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We present an on-chip liquid routing technique intended for application in well-based microfluidic systems that require long-term active pumping at low to medium flowrates. Our technique requires only one fluidic feature layer, one pneumatic control line and does not rely on flexible membranes and mechanical or moving parts. The presented bubble pump is therefore compatible with both elastomeric and rigid substrate materials and the associated scalable manufacturing processes. Directed liquid flow was achieved in a microchannel by an in-series configuration of two previously described "bubble gates", i.e., by gas-bubble enabled miniature gate valves. Only one time-dependent pressure signal is required and initiates at the upstream (active) bubble gate a reciprocating bubble motion. Applied at the downstream (passive) gate a time-constant gas pressure level is applied. In its rest state, the passive gate remains closed and only temporarily opens while the liquid pressure rises due to the active gate's reciprocating bubble motion. We have designed, fabricated and consistently operated our bubble pump with a variety of working liquids for >72 hours. Flow rates of 0-5.5 μl min(-1), were obtained and depended on the selected geometric dimensions, working fluids and actuation frequencies. The maximum operational pressure was 2.9 kPa-9.1 kPa and depended on the interfacial tension of the working fluids. Attainable flow rates compared favorably with those of available micropumps. We achieved flow rate enhancements of 30-100% by operating two bubble pumps in tandem and demonstrated scalability of the concept in a multi-well format with 12 individually and uniformly perfused microchannels (variation in flow rate <7%). We envision the demonstrated concept to allow for the consistent on-chip delivery of a wide range of different liquids that may even include highly reactive or moisture sensitive solutions. The presented bubble pump may provide active flow control for analytical and point-of-care diagnostic devices, as well as for microfluidic cells culture and organ-on-chip platforms.

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“…Mechanical pumps with moving parts have been reported using shape memory alloy 1 , electrostatic 2 , piezoelectric 3-7 , electromagnetic 8 , and other actuation schemes 9 . These devices typically consist of a deflectable membrane and a pair of either active or passive check valves.…”

Section: Introductionmentioning

confidence: 99%

<title>Ceramic magnetohydrodynamic (MHD) micropump</title>

et al. 2001

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Magnetohydrodynamic (MHD) pumping has several attractive features including no-moving-parts operation, compatibility with biological solutions, and bi-directional pumping capability. In this work, a re-circulating ceramic MHD micropump is described. The MHD operation principle is based on the generation of Lorenz forces on ions within an electrolytic solution by means of perpendicular electric and magnetic fields. These Lorenz forces propel the ions through a channel, thus creating a net flow with no moving parts. Fabrication of the pumps is achieved by means of a new ceramic MEMS (CMEMS) platform in which devices are built from multiple layers of green-sheet ceramics. The major advantage to this technology is that unlike many other fabrication technologies, the multi-layer ceramic CMEMS platform is truly three-dimensional, thus enabling the building of complex integrated systems within a single platform. The ceramic-based MHD pumps have been analyzed and tested using both finite element modeling and experimental validation. Test results indicate that the pumps are capable of pumping a wide range of biological fluids in the flow rate range of microliters per minute. Additionally, good stability over 24 hours and good correlation with modeling data have been verified.

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Long-term performance analysis of thermo-pneumatic micropump actuators

Cited by 8 publications

References 2 publications

Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators

Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators

Bubble pump: scalable strategy for in-plane liquid routing

<title>Ceramic magnetohydrodynamic (MHD) micropump</title>

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