Abstract:Aluminum-anode micro fabricated electrochemical cells activated on demand are a power-MEMS alternative. Cells of this type activated with alkaline electrolyte aqueous solution (20 µl) that contains hydrogen peroxide continue to be studied herein. Hydroxide concentration in this liquid and the cell configuration are the two issues investigated. Both affect the mechanistic kinetics of the chemical reactions involved in the production of energy and can be used to improve the energetic gravimetric density of these… Show more
“…and oxidation of M, releasing m electron-moles per mole of M, in the anode half-reaction [22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] …”
Section: Chemistry Considerationsmentioning
confidence: 99%
“…1B shows a process-flow for the fabrication of these cells. Details concerning the microfabrication process can be found elsewhere [33,34]. The resulting thickness of the cells was 0.25 cm and a footprint of 6 cm × 6 cm.…”
Section: ) Electrochemical Equivalents and Energetic Content Amentioning
confidence: 99%
“…Aluminum anode cells, with electrode interspacing on the order of microns, have been recently fabricated and studied [19][20][21][32][33][34]. Bleach solutions coupled with Al and Zn in thinform-factor, MEMS-fabricated cells provided sufficient specific energy and energy densities to power MEMS and/or other lowpower-requirement devices [35].…”
“…and oxidation of M, releasing m electron-moles per mole of M, in the anode half-reaction [22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] …”
Section: Chemistry Considerationsmentioning
confidence: 99%
“…1B shows a process-flow for the fabrication of these cells. Details concerning the microfabrication process can be found elsewhere [33,34]. The resulting thickness of the cells was 0.25 cm and a footprint of 6 cm × 6 cm.…”
Section: ) Electrochemical Equivalents and Energetic Content Amentioning
confidence: 99%
“…Aluminum anode cells, with electrode interspacing on the order of microns, have been recently fabricated and studied [19][20][21][32][33][34]. Bleach solutions coupled with Al and Zn in thinform-factor, MEMS-fabricated cells provided sufficient specific energy and energy densities to power MEMS and/or other lowpower-requirement devices [35].…”
“…Conventional batteries may have a short and, on occasion, unpredictable lifespan, and are often not suitable for use in situations where it is impossible or impractical to replace the battery [1]. Research effort has been intense in the development of MEMS-based batteries and fuel cells that can be an integral part of these sensor systems [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21]. Most of the micro galvanic cells that have appeared in literature are of the reserve type and can be activated 'on-demand' [2][3][4][5][6][7][8][9][10][11][12][13][17][18][19][20], but several rechargeable options have also been reported [14,15,21].…”
Section: Introductionmentioning
confidence: 99%
“…Research effort has been intense in the development of MEMS-based batteries and fuel cells that can be an integral part of these sensor systems [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21]. Most of the micro galvanic cells that have appeared in literature are of the reserve type and can be activated 'on-demand' [2][3][4][5][6][7][8][9][10][11][12][13][17][18][19][20], but several rechargeable options have also been reported [14,15,21]. 'On-demand' systems have the advantage of a long shelf life prior to introduction of the electrolyte, when using a stable electrolyte.…”
Energy on demand is an important concept in remote sensor development. The fabrication process for silicon-wafer-based, totally enclosed galvanic cells is presented herein. Benzocyclyobutene (BCB), a photo-patternable material, is used as the adhesive layer between the silicon wafers on which metal electrodes are patterned to form the cells' electrolyte cavity. As a case study, and since aluminum is an anode material with thermodynamic high energy density, this metal is evaporated onto a wafer and used as an anode. A sputtered platinum film collects the charge and provides a catalytic surface in the cell cathode. The metal film patterning process and wafer-to-wafer bonding with BCB is detailed. The difficulties encountered, and design modifications to overcome these, are presented. Cells of the mentioned design were activated with sodium hypochlorite solution electrolyte. Typical potential outputs for the cells, as a function of operational time, are also presented. With a 5 kΩ load, a potential of 1.4 V was maintained for over 240 min, until depletion of the electrolyte occurred. Average cell energy outputs under electrical loads between 100 Ω and 5 kΩ were in the range of 4–10 J with columbic densities ranging from 45 to 83 Ah L−1.
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