On GaAs and GaAs1–xPx (x = 0.375, 0.78) samples the beam voltage dependence of the CL spectra and the EBIC signal are measured. From the analysis of the experimental data by fitting the theoretical voltage dependent CL signal using minority carrier diffusion length values derived from the EBIC measurements the optical absorption coefficient and the internal spectral distribution of the recombination radiation in the relevant wavelength region are obtained. The results for various semiconductor materials clearly demonstrate differences in the shape of the optical absorption edge in the wavelength regions investigated which correspond to observed shifts between the internal and the external spectral distribution of the recombination radiation.