Lithographical laser ablation using femtosecond laser

Periodic Micropatterning of Polyethylene Glycol Diacrylate Hydrogel by Laser Interference Lithography Using Nano‐ and Femtosecond Pulsed Lasers

“…This disadvantage can be overcome by using large-area maskless lithography methods such as multibeam laser interference patterning (MLI). MLI has previously been used in the past using both femtosecond [18] and nanosecond lasers [19] on a wide range of materials including ceramics, metals and polymers. MLI involves the interference of two or more laser-beams permitting rapid fabrication with high design flexibility.…”

Fabrication of Periodic Microstructures in Pentaerythritol Triacrylate Through Femtosecond Laser Interference Two‐Photon Polymerization

“…In particular, materials processing with femtosecond lasers has been successfully applied with techniques such as direct laser writing (DLW) [1][2][3] and multibeam laser interference (MLI). [4][5][6] In addition, when femtosecond laser beams are tightly focused, multiphoton absorption (MPA) is induced in a region of volume around l 3 or even below the diffraction limit. [7][8][9] Given that DLW methods are sequential, long processing times are necessary to fabricate high density patterns on large areas (up to several hours).…”

Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser

“…To simplify such complexity of the optical system, studies are being conducted on the systems using DOE (Diffractive Optical Element) and lenses. [7][8][9][10][11] In this study, using a pulse laser with 12 picoseconds of pulse duration in an interference optical system implemented with DOE and lens, micro patterns were directly processed on NAK80 mold material. To the best of my knowledge, there is no report about the micro structuring on the mold material with four beam interference using a picosecond laser.…”