Wide-gap semiconductors with nanostructures such as nanoparticles, nanorods, nanowires are promising as a new type of UV photosensor. Recently, ZnO (zinc oxide) nanowires have been extensively investigated for electronic and optoelectronic device applications. ZnO nanowires are expected to have good UV response due to their large surface area to volume ratio, and they might enhance the performance of UV photosensors. In this paper, a new fabrication method of a UV photosensor based on ZnO nanowires using dielectrophoresis is demonstrated. Dielectrophoresis (DEP) is the electrokinetic motion of dielectrically polarized materials in non-uniform electric fields. ZnO nanowires, which were synthesized by nanoparticle-assisted pulsed-laser deposition (NAPLD) and suspended in ethanol, were trapped in the microelectrode gap where the electric field became higher. The trapped ZnO nanowires were aligned along the electric field line and bridged the electrode gap. Under UV irradiation, the conductance of the DEP-trapped ZnO nanowires exponentially increased with a time constant of a few minutes. The slow UV response of ZnO nanowires was similar to that observed with ZnO thin films and might be attributed to adsorption and photodesorption of ambient gas molecules such as O(2) or H(2)O. At higher UV intensity, the conductance response became larger. The DEP-fabricated ZnO nanowire UV photosensor could detect UV light down to 10 nW cm(-2) intensity, indicating a higher UV sensitivity than ZnO thin films or ZnO nanowires assembled by other methods.

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The direct comparison of the emission characteristics of an extreme ultraviolet (EUV) light between the CO2 and the Nd:YAG laser-produced plasmas (LPP) with a solid tin target is reported. In the case of the Nd:YAG LPP, the conversion efficiency (C.E.) peaked at a laser intensity of about 5×1010W∕cm2 and decreased at higher laser intensity. In the case of the CO2 LPP, the C.E. monotonically increased up to 2×1010W∕cm2, where the C.E. is comparable to the maximum C.E. of the Nd:YAG LPP. The spectral efficiency of the Nd:YAG LPP within the 2% bandwidth around 13.5 nm decreased with laser intensity. The corresponding spectral efficiency of the CO2 LPP was almost constant. This observation indicates the potential of the CO2 laser-produced LPP as the EUV light source for the EUV lithographic systems.

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