Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser

Abstract

A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a 1 μm peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A 1 μm pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).