We have found that a novel kinetic equation, similar to the logistic function in biological systems, replicates well the experimentally observed light-induced defect creation in amorphous semiconductors. It is proposed that a created defect, itself, has a triggering e ect for successive defect creation, which leads to new insight into understanding photodegradation in amorphous semiconductors.Photodegradation occurs in both hydrogenated amorphous silicon (a-Si : H) and amorphous chalcogenides (a-Ch), when illuminated by bandgap light (Shimakawa et al. 1995). The number of defects increases owing to bandgap irradiation. In a-Si : H, the creation of light-induced metastable defects (LIMDs) is now termed the Staebler± Wronski (SW) (1977) e ect.Although a great number of studies have been made to understand the origin of LIMD creation, how LIMDs are created is still not understood well (Shimakawa et al. 1995). Principally, several types of microscopic model for the SW e ect have been proposed. The most popular is based on the idea of breaking of weak Si± Si bonds induced by non-radiative recombination of band-tail electrons and holes (non-radiative recombination (NRR) model (Stutzmann et al. 1985, Morigaki 1988. The second class is the charge-transfer model in which electrons and holes are trapped at charged defects (Adler 1981). The other classes, for example, are an impurityrelated model (Red® eld and Bube 1990) and a self-trapped exciton (STE) model (Shimakawa et al. 1995) which requires a strong carrier± lattice interaction and is equivalent to bond breaking. In the NRR model (Stutzmann et al. 1985), the rate equation for inducing the defects is given bywhere N is the number of inducing defects, and n and p are the concentrations of band-tail electrons and holes respectively. Note that n and p are expected to vary inversely with N (self-limiting) and hence N is given as