“…The extent of LeTID can be manipulated by different factors, like the peak temperature of the firing step [15], [24], the cooling ramp of the firing step [12], [25], different preannealing steps [26], [27], [28], but also sample properties like the composition of the silicon nitride layer [7], [29], [30], interlayers such as aluminum oxide (Al 2 O 3 ) [31], [32], or the thickness of a sample [13], [33]. It was shown that the initial hydrogen concentration correlates with the peak firing temperature [34], besides other factors like the composition of the hydrogen-containing dielectric surface layers [35], or interlayers such as Al 2 O 3 [32], [36].…”