Lens Sag Measurement of Microlens Array Using Optical Interferometric Microscope

The application of confocal technology based on polycapillary X-ray optics in surface topography

“…Many technologies can characterize the surface topography of a sample, such as optical microscopy (OM), electron microscopy (EMS), scanning tunneling microscopy (STM), atomic force microscopy (AFM) and so forth [1][2][3][4]. These methods can be used to investigate the surface concavity/convexity and defects; however, they each have shortcomings.…”