Simple offset gated n-channel polysilicon thin film transistors (TFTs) of channel length = 10 m were investigated in relation to the intrinsic offset length 1 and the polysilicon quality. For 1 1 m, the device parameters such as threshold voltage, subthreshold slope and field effect mobility are improved, while the leakage current remains unchanged. In TFTs with 1 1 m, the leakage current decreases with increasing the offset length. When the polysilicon layer is of high quality (large grain size and low intra-grain defect density), the leakage current is completely suppressed without sacrificing the on-current in TFT's with offset length of 2 m.